Abstract: The surface topology of a plug surface area-containing surface of a semiconductor device can be improved by removing material to create a first planarized surface with at least one plug surface area, typically a tungsten or copper plug area, comprising a recessed region. A material is deposited onto the first planarized surface, to create a material layer, and into the upper portion of the recessed region. The material layer is removed to create a second planarized surface with the material maintained in the upper portion of the recessed region. To form a semiconductor phase change memory device, a phase change element is formed between the at least one plug area, acting as a first electrode, at the second planarized surface and a second electrode.

Abstract: A process for fabricating phase-change elements having ultra small cross-sectional areas for use in phase change memory cells specifically and in semiconductor devices generally in which pads are implemented to create horizontally aligned phase change elements is disclosed. The elements thus defined may be used within chalcogenide memory cells or other semiconductor devices.