Abstract: A wafer handling apparatus having a variable pitch includes a supporting surface (12) for holding a boat (14) in a predetermined location. An elevator mechanism (20) is operable to move upward through the boat to lift wafers (16) upward into intermediate restraining combs (24) and (26). Combs (22) are disposed on the elevator mechanism (20) for holding the wafers (16) on the edges thereof. The combs (22) can have the pitch thereof varied by the operation of a cylinder (56). The combs (22) have two rotating brackets (42) and (40) disposed on the sides thereof. The brackets (42) and (40) are pivoted on an elevator bracket (28) at points (44) and (46). When the lower bracket (40) is reciprocated upward by the cylinder (56) and the associated rod (54), the space between the combs (22) decreases.

Abstract: A wafer lifting apparatus is comprised of guide rails (10) that are disposed on a supporting surface (22). A lifting apparatus (24) is disposed on the surface (22), having an inclined surface (26). Grooves (28) are disposed on the inclined surface and spaced apart a distance equal to that of wafers (20) in a wafer handling boat (16). The wafer handling boat (16) has the end pieces (12) and (14) urged downward into the guide rails (10) until the lowermost peripheral edges of the wafers (20) contact the grooves (28) in the inclined surface (26). When fully lowered, the rearmost ones of the wafers (20) are completely lifted out of the boat such that they are supported entirely by the grooves (28). In this manner, they can be viewed from the end of the wafer lifting apparatus. A flat finding device in the form of a flat finding cylinder (44) is also provided in an opening (38) on a supporting surface (36) for holding the boat (16).