Abstract: A magnetic sensor and a manufacturing method thereof are provided. The magnetic sensor includes: a substrate comprising a plurality of Hall elements, a protective layer formed on the substrate, a base layer formed on the protective layer, and an integrated magnetic concentrator (IMC) formed on the base layer and comprising a surface with an elevated portion. The base layer has a larger cross-sectional area than the IMC.
August 9, 2013
December 18, 2014
MagnaChip Seminconductor, Ltd.
Seung Han RYU, Jong Yeul JEONG, Kwan Soo KIM