Patents Assigned to Maheson Tri-Gas, Inc.
  • System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system
    Patent number: 9831627
    Abstract: The present invention relates to a system for recirculating the gas atmosphere within an excimer laser system, where contaminates, created in the laser's operation, are removed, and the gas concentrations of additive gases, such as Xe, Kr, or others, depleted in the laser operation, are rebalanced to specific lasing mixtures by analyzation and component replenishment from one or more external supplies.
    Type: Grant
    Filed: August 23, 2016
    Date of Patent: November 28, 2017
    Assignee: Maheson Tri-Gas, Inc.
    Inventors: Joseph Vininski, Dane Scott