Patents Assigned to Maruwa Co., Ltd.
-
Patent number: 11643368Abstract: The invention provides a ceramic device enabling more complex, elaborate patterns for resistance heating elements or electrodes. A ceramic device includes a ceramic substrate consisting of a ceramic sintered body and including at least a base layer, an intermediate layer laminated over the base layer, and an overlayer laminated over the intermediate layer; and an electrifiable resistance heating element or electrode having a predetermined pattern extending in a planar shape and being embedded in the ceramic substrate. A horizontal surface is defined in the upper surface of the intermediate layer, along which the resistance heating element or electrode is arranged, and the overlayer is laminated onto the upper surface of the intermediate layer to cover the resistance heating element or electrode.Type: GrantFiled: December 25, 2018Date of Patent: May 9, 2023Assignee: MARUWA CO., LTD.Inventors: Kazuhisa Toyofuku, Masaaki Tanaka, Kiminori Hori
-
Patent number: 11358865Abstract: Provided is a spherical aluminum nitride powder having a particle shape that is closer to sphericity. The spherical aluminum nitride powder according to the present invention, which contains a main component comprising AlN and a side component comprising a rare earth compound, is characterized in that at least 70% of particles in the powder have an outer peripheral shape having neither an angular edge part nor an uneven part in the plane projection image of individual particles.Type: GrantFiled: August 5, 2019Date of Patent: June 14, 2022Assignee: MARUWA CO., LTD.Inventors: Fuyuki Ito, Daisuke Kato, Mitsutaka Takahashi
-
Patent number: 11319254Abstract: An aluminum nitride sintered body with improved mechanical strength without compromised thermal dissipating properties. The aluminum nitride sintered body contains 100 parts by weight of AlN, 3 to 20 parts by weight on an oxide basis of at least one type of nitride selected from the group consisting of Zr and Ti as an additive, and 1 to 10 parts by weight of Y2O3 as a sintering aid. The oxygen content in the sintered body is 1.8 wt % or less, and the thermal conductivity is 130 W/m·K or higher.Type: GrantFiled: September 19, 2018Date of Patent: May 3, 2022Assignee: MARUWA CO., LTD.Inventors: Mitsutaka Takahashi, Genki Hirashima, Daisuke Kato
-
Patent number: 10460965Abstract: A bearing (12) being a recessed section that receives a spindle (20) is provided in a lower surface (10B) of a susceptor (10). The bearing (12) has a tapers from the lower surface (10B) towards an upper surface (10A). A gap (12B) is provided in an side wall (12A) of the bearing (12), further on the outside of the bearing (12) than a fitting surface (12X) between the bearing (12) and the spindle (20) in the horizontal direction. As a result, reduction in the fitting force between the susceptor bearing and the spindle can be suppressed and susceptor temperature reduction in the vicinity of the bearing can also be suppressed.Type: GrantFiled: August 13, 2014Date of Patent: October 29, 2019Assignee: MARUWA CO., LTD.Inventor: Fumiya Kobayashi
-
Patent number: 10287685Abstract: Provided is a susceptor capable of achieving improved thermal uniformity while suppressing reduction in its temperature increase rate and heat utilization efficiency. A susceptor includes a plate-shaped first member including a wafer placement surface on which to place a wafer, and a second member supporting the first member and laid on the first member in the direction perpendicular to the wafer placement surface. The thermal conductivity of the first member is higher than the thermal conductivity of the second member.Type: GrantFiled: August 29, 2014Date of Patent: May 14, 2019Assignee: MARUWA CO., LTD.Inventors: Fumiya Kobayashi, Sho Kumagai, Kazuhiro Ushita, Tadashi Onishi, Tomonori Ishigaki
-
Patent number: 8859072Abstract: A cut-out sintered ceramic sheet including a side surface, the entire surface of which is a fracture surface having reliefs, wherein a plastic resin film is adhered onto upper and lower surfaces of the cut-out sintered ceramic sheet.Type: GrantFiled: February 14, 2013Date of Patent: October 14, 2014Assignee: Maruwa Co., Ltd.Inventors: Ikuo Nishi, Sei Kanbe
-
Patent number: 8747590Abstract: A method of manufacturing a cut-out sintered ceramic sheet including forming a ceramic green sheet, sintering the formed ceramic green sheet, adhering a plastic resin film onto which adhesive is applied on at least one surface of the sintered ceramic sheet, and shearing the sintered ceramic sheet.Type: GrantFiled: March 21, 2013Date of Patent: June 10, 2014Assignee: Maruwa Co., Ltd.Inventors: Ikuo Nishi, Sei Kanbe
-
Patent number: 8747589Abstract: A method of manufacturing a cut-out sintered ceramic sheet having a complex shape and a cut-out sintered ceramic sheet made according to the method, the method including forming a ceramic green sheet, sintering the formed ceramic green sheet, adhering a plastic resin film onto which adhesive is applied on at least one surface of the sintered ceramic sheet, and shearing the sintered ceramic sheet.Type: GrantFiled: October 11, 2012Date of Patent: June 10, 2014Assignee: Maruwa Co. Ltd.Inventors: Ikuo Nishi, Sei Kanbe
-
Patent number: 8614648Abstract: An antenna module and methods for manufacturing an antenna module, the antenna module including a magnetic material sheet for focusing a magnetic flux, an antenna conductor deposited on the magnetic material sheet and formed in a predetermined pattern, and a protection layer deposited on the antenna conductor for protecting the antenna conductor.Type: GrantFiled: February 22, 2013Date of Patent: December 24, 2013Assignee: Maruwa Co., Ltd.Inventor: Yasushi Kojima
-
Publication number: 20130222198Abstract: An antenna module and methods for manufacturing an antenna module, the antenna module including a magnetic material sheet for focusing a magnetic flux, an antenna conductor deposited on the magnetic material sheet and formed in a predetermined pattern, and a protection layer deposited on the antenna conductor for protecting the antenna conductor.Type: ApplicationFiled: February 22, 2013Publication date: August 29, 2013Applicant: MARUWA, CO., LTDInventor: MARUWA, CO., LTD
-
Publication number: 20130224499Abstract: A method of manufacturing a cut-out sintered ceramic sheet including forming a ceramic green sheet, sintering the formed ceramic green sheet, adhering a plastic resin film onto which adhesive is applied on at least one surface of the sintered ceramic sheet, and shearing the sintered ceramic sheet.Type: ApplicationFiled: March 21, 2013Publication date: August 29, 2013Applicant: MARUWA CO., LTD.Inventor: MARUWA CO., LTD.
-
Publication number: 20130156996Abstract: A cut-out sintered ceramic sheet including a side surface, the entire surface of which is a fracture surface having reliefs, wherein a plastic resin film is adhered onto upper and lower surfaces of the cut-out sintered ceramic sheet.Type: ApplicationFiled: February 14, 2013Publication date: June 20, 2013Applicant: MARUWA CO., LTD.Inventor: Maruwa Co., Ltd.
-
Publication number: 20130122250Abstract: A method of manufacturing a cut-out sintered ceramic sheet having a complex shape and a cut-out sintered ceramic sheet made according to the method, the method including forming a ceramic green sheet, sintering the formed ceramic green sheet, adhering a plastic resin film onto which adhesive is applied on at least one surface of the sintered ceramic sheet, and shearing the sintered ceramic sheet.Type: ApplicationFiled: October 11, 2012Publication date: May 16, 2013Applicant: MARUWA CO., LTD.Inventors: Ikuo Nishi, Sei Kanbe
-
Patent number: 8323776Abstract: A method of fabricating a composite ferrite sheet including the steps of: (a) forming a grooved green ferrite sheet having a non-intersecting grid pattern by pressing a groove forming die including a plurality of first protrusions and a plurality of second protrusions having a triangular cross sectional shape, each protrusion of at least one of the plurality of first protrusions and the plurality of second protrusions being discontinuous at each imaginary intersecting portion at which extension lines of the respective first and second protrusions intersect each other, (b) firing the grooved ferrite green sheet to obtain a sintered ferrite sheet, (c) bonding at least one supporting sheet to at least one of opposite major surfaces of the sintered ferrite sheet, and (d) rupturing the sintered ferrite sheet along the grooves into a multiplicity of separate and independent rectangular planar ferrite segments which are bonded to the supporting sheet.Type: GrantFiled: December 13, 2011Date of Patent: December 4, 2012Assignee: Maruwa Co., Ltd.Inventor: Ikuo Nishi
-
Publication number: 20120088070Abstract: A method of fabricating a composite ferrite sheet including the steps of: (a) forming a grooved green ferrite sheet having a non-intersecting grid pattern by pressing a groove forming die including a plurality of first protrusions and a plurality of second protrusions having a triangular cross sectional shape, each protrusion of at least one of the plurality of first protrusions and the plurality of second protrusions being discontinuous at each imaginary intersecting portion at which extension lines of the respective first and second protrusions intersect each other, (b) firing the grooved ferrite green sheet to obtain a sintered ferrite sheet, (c) bonding at least one supporting sheet to at least one of opposite major surfaces of the sintered ferrite sheet, and (d) rupturing the sintered ferrite sheet along the grooves into a multiplicity of separate and independent rectangular planar ferrite segments which are bonded to the supporting sheet.Type: ApplicationFiled: December 13, 2011Publication date: April 12, 2012Applicant: Maruwa Co., Ltd.Inventor: Ikuo NISHI
-
Patent number: 5985442Abstract: A wall lining material consists of an upper mat body, a lower mat body and a granular moisture absorbent. The upper mat body and the lower mat body are made of a nonwoven fabric containing a multiplicity of fibers. The moisture absorbent is located between these two mat bodies. The mat bodies are sewn together over the laminated portion at many points by means of needle punching. This needle punching causes the fibers in the upper mat body to be connected with those in the lower mat wed and vice versa.Type: GrantFiled: June 9, 1997Date of Patent: November 16, 1999Assignee: Maruwa Co., Ltd.Inventor: Megumi Nagaya
-
Patent number: D671510Type: GrantFiled: August 12, 2010Date of Patent: November 27, 2012Assignee: Maruwa Co., Ltd.Inventors: Tsutomu Amano, Toshiro Kanbe, Yoshinori Izukura
-
Patent number: D671511Type: GrantFiled: May 27, 2011Date of Patent: November 27, 2012Assignee: Maruwa Co., Ltd.Inventors: Tsutomu Amano, Toshiro Kanbe, Yoshinori Izukura