Abstract: A vacuum deposition chamber alternately receives a reactive gas and an inert gas during a process in which a thin film is formed on a wafer in the chamber. The inert gas flows through a first pressure regulator, a first feed line and a first changeover valve into the chamber. The reactive gas flows through a second pressure regulator, a second feed line and a second changeover valve into the chamber. A vent line is connected to a vacuum pump and a pressure regulating valve which vents to the atmosphere to thereby control the vacuum pressure in the vent line. A first shunt valve is connected between the vent line and the first feed line and a second shunt valve is connected between the vent line and the second feed line.

Abstract: A diaphragm valve is provided with a removable metallic elastic seating ring (7) having a first passage (10) and at least one second passage (11) extending through it. The first passage communicates with an inlet passage (8) of the valve while the second passage communicates with the outflow passage (9). A first surface (7a) of the seating ring is provided with a valve seat (12) against which the diaphragm (6) may be pressed to block fluid flow through the valve. A second surface (7b) of the seating ring has two annular and axially extending projections (15, 16). The first projection (15) contacts a bottom surface (2a) of valve chamber (2) in a region surrounding the opening where the inflow passage joins the valve chamber. The second projection (16) contacts the bottom surface of the valve chamber around the periphery of the valve chamber.

Abstract: A valve body is provided with a gas feed passage having an inlet and an outlet, a tank chamber, and a branch passage having a first portion connected between the gas feed passage and the tank chamber and an outlet extending from the tank chamber to a side of the valve body. A first valve is mounted on the valve body and selectively opens and closes the gas feed passage at a point downstream of the junction of the branch passage with the gas feed passage. A second valve is mounted on the valve body and selectively opens and closes the branch passage at a point between the tank chamber and the junction of the branch passage and the gas feed passage. A vacuum pump is provided to evacuate the tank chamber. When the first valve is open and the second valve is closed, gas may flow from an inlet pipe, through the gas feed passage and the first valve to a semiconductor process chamber.

Abstract: In an arc welding process for welding pipes used to convey high purity gas, dispersion of particles into the pipes during welding is reduced by discharging an inert back shielding gas into one end of one pipe and holding the welding current at less than the normal welding current for a specified interval after the start of arc, the welding current thereafter being increased to its normal level.

Abstract: In a flow rate control valve having a handle (12) for rotating a stem (9), the handle being locked to a bonnet (3) by a lock screw (14), the handle (12) comprises a handle main body (12') fixed to an upper end of the stem (9), and a tubular lock handle (12") coupled to the lower end of the handle main body (12'). The lock handle is movable in a direction orthogonal to an axial line of elongation Y of the stem 9 relative to the handle main body, with the lock handle enclosing the upper outer circumference of the bonnet (3), and the lock screw (14) being movable in the lock handle (12") in a direction nearly orthogonal to the axial line of elongation Y of the stem (9) to engage the bonnet (3).

Abstract: A diaphragm type fluid flow controller comprises a valve body having formed therein an inlet and an outlet passage, the passages communicating with a valve chamber formed in the valve body. The valve chamber is sealed by a flexible diaphragm. A threaded valve stem is rotated by a handle to cause pressure to be applied to the diaphragm to selectively open or close the valve. A stop ring limits movement of the valve stem in the direction of the diaphragm so that the pressure applied to the diaphragm is limited once the valve is closed. The diaphragm comprises a plurality of nested thin metal dome-shaped plates having upturned peripheral edges which are clamped between the stop ring and a rim formed on the valve body at the upper extent of the valve chamber. The plural plates insure air-tightness of the valve chamber because any rotation of the stop ring, resulting from tightening the valve after closure, is not transmitted to the lower-most diaphragm plate.

Abstract: In a diaphragm type control valve, a slide stem (14) having a coupling screw part (14a) is elevatably but non-rotatably inserted into a bonnet (11) having a coupling screw part (11c). A rotary stem (15) has concentrically a first coupling screw part (22) of thread pitch P1 inside, and a second coupling screw part (23) of thread pitch P2 larger than the thread pitch P1 outside is coaxially disposed above the slide stem (14), the first coupling screw part (22) being driven into the coupling screw part (14i c) of the slide stem (14), and the second coupling screw part (23) into the coupling screw part (11c) of the bonnet (11), so that the slide stem (14) is moved vertically by a small distance at each revolution of the rotary stem (15).

Abstract: A fluid flow controller comprising a flow passage which is opened and closed by the flexing of a diaphragm secured at its periphery characterized in that the diaphragm is a laminate of a plurality of metal diaphragms and in that friction reducing material is provided between the diaphragms.

Abstract: A fluid flow control valve is provided with a seal comprising a thin metallic film backed by a resiliently deformable body. The seal is mounted on a closure part which may be either the valve stem or the valve seat. The thin film and deformable body are deformed so as to conform to the surface the metallic film seals against as the valve is closed. As the valve is opened, the deformable body returns to its initial state thus returning the thin film to its initial state.

Abstract: A check valve comprises a valve body having inlet and outlet passages and a cavity in which a diaphragm operates. The inlet passage connects with the cavity through an upstream wall partly defining the cavity and the outlet passage connects with the cavity through a downstream wall partly defining the cavity. The diaphragm has an annular sheet metal part which is secured to one of the walls and carries a movable seal. The movable seal cooperates with a sealing element to provide a circular fluid seal. In a first embodiment, the inlet passage connects with the cavity through openings located inside the periphery of the circular fluid seal. In a second embodiment the inlet passage connects with the cavity through openings located outside the periphery of the circular fluid seal. The movable seal may be a sealing surface in which case the sealing element is a seal ring, or the movable seal may comprise a seal ring in which case the sealing element is a sealing surface.

Abstract: A check valve comprises a valve body having inlet and outlet passages and a cavity in which a diaphragm operates. The inlet passage connects with the cavity through an upstream wall partly defining the cavity and the outlet passage connects with the cavity through a downstream wall partly defining the cavity. The diaphragm has an annular sheet metal part which is secured to one of the walls and carries a movable seal. The movable seal cooperates with a sealing element to provide a circular fluid seal. In a first embodiment, the inlet passage connects with the cavity through openings located inside the periphery of the circular fluid seal. In a second embodiment the inlet passage connects with the cavity through openings located outside the periphery of the circular fluid seal. The movable seal may be a sealing surface in which case the sealing element is a seal ring, or the movable seal may comprise a seal ring in which case the sealing element is a sealing surface.

Abstract: The pilot type controlled electromagnetic valve system in accordance with the present invention is opened and closed principally by means of automatic remote control.The controlled valve system comprises a main valve F; a pilot valve G for opening and closing the main valve F by means of the fluid pressure on the primary side; a latching solenoid H for opening and closing the pilot valve G; and a solenoid drive control unit I for driving the solenoid H by supplying a discharge current from a capacitor to the solenoid. A pulse discharge current is supplied to the solenoid H from the capacitor C only when the pilot valve G is opened or closed, and no excitation current is supplied continuously through the coil of the solenoid. As a result, the power source battery can be reduced in size, and therefore virtually no accidents take place in the controlled valve system due to no heat generation in the coil.