Patents Assigned to Master Images, Inc. - Justia Patents Search

Patents Assigned to Master Images, Inc.

Cassette improved to reduce particle contamination of reticles during photolithographic processing operations

Patent number: 4851692

Abstract: A means of improving an E-beam lithography system cassette to reduce wear of contaminating particles from the cassette whereby frictionally engaged surfaces of the cassette are coated and hardened with an electroless deposit of nickel-phosphorous alloy.

Type: Grant

Filed: December 18, 1987

Date of Patent: July 25, 1989

Assignee: Master Images, Inc.

Inventor: Jeffrey P. Villano