Patents Assigned to Mastsuchita Electric Industrial Co., Ltd.
  • Polymers, chemical amplification resist compositions and patterning process
    Patent number: 6461790
    Abstract: Polymers comprising fluorinated vinyl phenol units and having acid labile groups partially introduced are novel. Using such polymers, resist compositions featuring transparency to excimer laser and alkali solubility are obtained.
    Type: Grant
    Filed: September 8, 2000
    Date of Patent: October 8, 2002
    Assignees: Shin-Etsu Chemical Co., Ltd., Mastsuchita Electric Industrial Co., Ltd.
    Inventors: Jun Hatakeyama, Jun Watanabe, Yuji Harada, Mutsuo Nakashima, Masaru Sasago, Shinji Kishimura