Patents Assigned to MATERIAL TECHNOLOGIES CORPORATION
  • Publication number: 20250069942
    Abstract: A wafer support includes a base material including at least boron nitride as a machinable ceramic, a protective layer covering a surface of the base material, and a conductive member placed at least partially inside the base material. The base material includes a first layer and a second layer between the first layer and the protective layer. The protective layer includes a material that is less corrodible by plasma than the base material. The following formula is satisfied: 5?W1?W2?35 where the proportion of boron nitride contained in the first layer is represented by W1 [mass %] and the proportion of boron nitride contained in the second layer is represented by W2 [mass %].
    Type: Application
    Filed: November 15, 2024
    Publication date: February 27, 2025
    Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Wataru YAMAGISHI, Kazumasa MORI, Hitoshi KOUNO, Shunichi ETO
  • Patent number: 12027076
    Abstract: A swatch presentation system is disclosed. The swatch presentation system may include a plurality of layers with an opening in a first layer. The first opening of the first layer allows for the viewing of a swatch. The swatch presentation system may include a second layer, where a first surface of the second layer engages at least a portion of a first surface of the swatch. The first surface of the second layer and the opening of the first layer may form a cavity where the swatch is displayed. The second layer may be a frame. The swatch presentation system may also include a third layer, where a first surface of the third layer engages a second surface of the second layer. A second surface of the third layer may include an opening that may store a transmitter. The transmitter may transmit data identifying the swatch presentation system.
    Type: Grant
    Filed: April 23, 2020
    Date of Patent: July 2, 2024
    Assignee: MATERIAL TECHNOLOGIES CORPORATION
    Inventor: Adam I. Sandow
  • Publication number: 20240177974
    Abstract: A wafer support includes a base material including a machinable ceramic, a protective layer covering a surface of the base material, and conductive members and placed at least partially inside the base material. The protective layer includes a material that is less corrodible by plasma than the base material.
    Type: Application
    Filed: February 5, 2024
    Publication date: May 30, 2024
    Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Wataru YAMAGISHI, Kazumasa MORI, Hitoshi KOUNO, Shunichi ETO
  • Patent number: 11940466
    Abstract: A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrO2 and/or Si3N4: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at ?50 to 500° C. of 1.0×10?6 to 5.0×10?6/° C., is excellent in low electrostatic properties (106 to 1014 ?·cm in volume resistivity) and free-machining properties, and is thus suitable to be used for, for example, a probe guiding member for guiding probes of a probe card, and a socket for package inspection.
    Type: Grant
    Filed: October 19, 2018
    Date of Patent: March 26, 2024
    Assignee: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Wataru Yamagishi, Kazumasa Mori, Shunichi Eto
  • Patent number: 11851258
    Abstract: A material storage and transport system is disclosed. The material storage and transport system can include a material storage tray forming a storage volume defined by a bottom and walls extending up from the bottom along a perimeter of the bottom. The material storage and transport system can also include a releasable strap adapted to extend across the bottom when in a securing configuration and a sample carrier, including at least one sample secured to a sample support substrate by a molded sheet. The material storage and transport system can include a hinged lid that is integrally connected to a wall of the material storage tray, and configured to convert between a folded-in position, an opened position, and a closed position.
    Type: Grant
    Filed: February 4, 2022
    Date of Patent: December 26, 2023
    Assignee: MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Adam I. Sandow, Paul Charles Bird, Sarah Smith
  • Publication number: 20230312423
    Abstract: A ceramic containing, in mass %: Si3N4: 20.0 to 60.0%, ZrO2: 25.0 to 70.0%, at least one selected from SiC and AlN: 2.0 to 17.0%, where AlN is 10.0% or less, at least one selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO and V2O5: 5.0 to 15.0%, wherein Fn calculated from the following equation (1) satisfies 0.02 to 0.40. This ceramic can be laser machined with high efficiency.
    Type: Application
    Filed: April 8, 2021
    Publication date: October 5, 2023
    Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Wataru YAMAGISHI, Kazumasa MORI, Shunichi ETO
  • Patent number: 11659767
    Abstract: A thermoelectric element-containing package according to one aspect of the present disclosure includes a thermoelectric conversion module including: a first substrate having first and second main surfaces; a second substrate having third and fourth main surfaces; and a plurality of thermoelectric elements that are sandwiched between the first and second substrates and arranged along the second main surface and the third main surface. The thermoelectric element-containing package further includes: a frame joined to the first and second substrates so as to form a hermetically sealed space surrounding the plurality of thermoelectric elements and disposed between the first substrate and the second substrate; and a placement member that is disposed on the first main surface of the first substrate or the fourth main surface of the second substrate and to which an additional device is to be connected.
    Type: Grant
    Filed: February 14, 2018
    Date of Patent: May 23, 2023
    Assignees: NGK SPARK PLUG CO., LTD., FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Masahiro Ogawa, Tetsuya Kato, Takayuki Hachida
  • Patent number: 11622096
    Abstract: An object feature visualization system is disclosed. The system may include a computing device that generates video-mapped images to project onto physical objects. The video-mapped images may include features to be projected onto the objects. The projection of a video-mapped image onto the physical object allows for the visualization of the feature on the object. In some examples, the computing device receives a feature selection for a particular object, and generates a video-mapped image with the selected feature to provide to a projector to project the video-mapped image onto the physical object. In some examples, a user is able to select one or more features for one or more objects of a room display via a user interface. The system then projects video-mapped images with the selected features onto the physical objects. The system may allow a user to save feature selections, and to purchase or request additional information about objects with selected features.
    Type: Grant
    Filed: August 31, 2021
    Date of Patent: April 4, 2023
    Assignee: MATERIAL TECHNOLOGIES CORPORATION
    Inventor: Adam I. Sandow
  • Patent number: 11485686
    Abstract: A ceramic contains, in mass percent: Si3N4: 20.0 to 60.0%, ZrO2: 25.0 to 70.0%, and one or more oxides selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO, and V2O5: 5.0 to 15.0%. The ceramic has a coefficient of thermal expansion as high as that of silicon and an excellent mechanical strength, allows fine machining with high precision, and prevents particles from being produced.
    Type: Grant
    Filed: November 7, 2018
    Date of Patent: November 1, 2022
    Assignee: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Wataru Yamagishi, Kazumasa Mori, Shunichi Eto
  • Publication number: 20220194860
    Abstract: A mixed member of SiC and Si, the mixed member being formable without using a resin as a medium irrespective of its shape. To achieve the object, a feature of the mixed member of SiC and Si (SiC/Si mixed member) lies in that a SiC member (filler) in a chip form or powdery form is dispersed in a Si member (base material) having a polycrystalline structure. Further, the SiC/Si mixed member with such a feature can be configured such that a SiC coating layer is formed on a surface of the SiC/Si mixed member.
    Type: Application
    Filed: December 17, 2020
    Publication date: June 23, 2022
    Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventor: Mayumi NAKAMOTO
  • Patent number: 11306029
    Abstract: An alumina sintered body comprising 0.01 to 1.0 mass % of one or more types selected from Ta, Nb, and V in terms of oxide thereof. The alumina sintered body may further comprise 0.01 to 1.0 mass % of Mg in terms of Mg oxide. It is particularly preferable that the alumina sintered body has an alumina purity of 99% or more. An alumina sintered body having low dielectric loss as compared with that in related art can therefore be produced at low cost.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: April 19, 2022
    Assignee: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Shunichi Eto, Osanobu Fukuo, Kiyotaka Saitou
  • Patent number: 11273967
    Abstract: A material storage and transport system is disclosed. The material storage and transport system can include a material storage tray forming a storage volume defined by a bottom and walls extending up from the bottom along a perimeter of the bottom. The material storage and transport system can also include a releasable strap adapted to extend across the bottom when in a securing configuration and a sample carrier, including at least one sample secured to a sample support substrate by a molded sheet. The material storage and transport system can include a hinged lid that is integrally connected to a wall of the material storage tray, and configured to convert between a folded-in position, an opened position, and a closed position.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: March 15, 2022
    Assignee: MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Adam I. Sandow, Paul Charles Bird, Sarah Smith
  • Publication number: 20210188714
    Abstract: A ceramic contains, in mass percent: Si3N4: 20.0 to 60.0%, ZrO2: 25.0 to 70.0%, and one or more oxides selected from MgO, Y2O3, CeO2, CaO, HfO2, TiO2, Al2O3, SiO2, MoO3, CrO, CoO, ZnO, Ga2O3, Ta2O5, NiO, and V2O5: 5.0 to 15.0%. The ceramic has a coefficient of thermal expansion as high as that of silicon and an excellent mechanical strength, allows fine machining with high precision, and prevents particles from being produced.
    Type: Application
    Filed: November 7, 2018
    Publication date: June 24, 2021
    Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Wataru YAMAGISHI, Kazumasa MORI, Shunichi ETO
  • Patent number: 10875697
    Abstract: A material storage and transport system is disclosed. The material storage and transport system can include a material storage tray forming an open-top storage volume defined by a bottom and walls extending up from the bottom along a perimeter of the bottom. The material storage and transport system can also include a releasable strap adapted to extend across the bottom when in a securing configuration and a sample carrier, including at least one sample secured to a sample support substrate by a molded sheet. A lid element and the sample carrier can be adapted (i) to fit within the storage volume when arranged parallel to the bottom, and (ii) to be secured to the material storage tray by the releasable strap.
    Type: Grant
    Filed: September 27, 2018
    Date of Patent: December 29, 2020
    Assignee: MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Adam I. Sandow, Paul Charles Bird, Sarah Smith
  • Publication number: 20200239368
    Abstract: An alumina sintered body comprising 0.01 to 1.0 mass % of one or more types selected from Ta, Nb, and V in terms of oxide thereof. The alumina sintered body may further comprise 0.01 to 1.0 mass % of Mg in terms of Mg oxide. It is particularly preferable that the alumina sintered body has an alumina purity of 99% or more. An alumina sintered body having low dielectric loss as compared with that in related art can therefore be produced at low cost.
    Type: Application
    Filed: July 31, 2018
    Publication date: July 30, 2020
    Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Shunichi ETO, Osanobu FUKUO, Kiyotaka SAITOU
  • Publication number: 20200241047
    Abstract: A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrO2 and/or Si3N4: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at ?50 to 500° C. of 1.0×10?6 to 5.0×10?6/° C., is excellent in low electrostatic properties (106 to 1014 ?·cm in volume resistivity) and free-machining properties, and is thus suitable to be used for, for example, a probe guiding member for guiding probes of a probe card, and a socket for package inspection.
    Type: Application
    Filed: October 19, 2018
    Publication date: July 30, 2020
    Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Wataru YAMAGISHI, Kazumasa MORI, Shunichi ETO