Abstract: The high density RF plasma generator of this invention uses special antenna configurations (15) to launch RF waves at low frequency such as 13.56 MHz along a magnetic field supplied by an external magnetic field generator (16.17) in a discharge space (14) where the working gas is introduced and which is used alone or in conjunction with a process chamber (18) where specimen substrates (20) are located to either deposit or etch films from a substrate or to sputter deposit films to a substrate. The plasma etching, deposition and/or sputtering system comprises the high density RF plasma generator, the external magnetic field, the gas injection and control system, the antenna system (15) and associated power supplies (48), the process chamber (18), and the means to couple plasma from the generator to substrates or targets, including magnetic means (36) to enhance plasma uniformity at the substrates (20) or targets (92).

Abstract: A getter wire is made by wrapping alternate layers of getter metal and refractory metal around an ingot of refractory metal. The composite ingot thus formed is reduced to wire, preferably by extrusion and drawing. The multi layers of refractory and getter metals can then be heated to form an alloy of the two metals from which the getter is evaporated during use. A preferred combination is tantalum as refractory and titanium as getter.

Abstract: A fire protective blanket construction providing multiple time protection for application to electrical conduit and cable trays to preserve operation of electrical circuitry carried by the cables in the event of exposure to fire. Comprising the prefabricated fire resistant blanket are back-to-back blanket sections separated by a moisture impervious metal foil. Disposed within the outer of the blanket section on the exterior side of the foil is a transversely extending envelope containing a selected thickness of trihydrated alumina in powdered form. When exposed to high temperature, the trihydrated alumina emits a steam vapor for protecting the article to which the blanket has been applied for a time period correlated to the thickness and other thermal properties of the individual elements comprising the blanket.

Abstract: A fire resistant flexible seal for sealing a breach between movable architectural barriers. The flexible seal is comprised of a plurlaity of layers of fire resistant materials. In a preferred embodiment, a first non-porous sheet is affixed to each side of the breach and forms an open loop within the gap. The size of the loop may be varied to accommodate the amount of movement anticipated by the architect. A blanket of ceramic insulating material is nested within the loop formed by the non-porous sheet and a second blanket is mounted in an open loop across the breach, thereby defining an enclosed air space between the ceramic insulating blankets. A second non-porous sheet is nested within the upper ceramic blanket and serves to enclose the ceramic blankets within a moisture resistant envelope. In alternate applications in which it is desired to achieve the capability to withstand high pressure, an additional sheet of high strength heat resistant material can be added to the seal.

Abstract: Small particles of metal, such as those used in making powder metal compacts, are produced by feeding the end of a metal wire or rod against the edge of a rotating disc and causing a direct electrical current to flow through the wire and disc. This melts the end of the wire and also creates a magnetic field about the wire. The rotation of the disc breaks the electrical contact and forms an arc which causes additional melting of the wire. Contact between the wire and disc takes place within a second electromagnetic field. Continuously advancing the end of the wire causes the intermittent making and breaking of electrical contact. The interaction of the two magnetic fields causes the molten particles to be removed from the area of contact. Means are provided for cooling and collecting the metal particles and for preventing the accumulation of solidified metal particles on the electromagnet or the rotating disc. Vacuum conditions may be used, thus producing a powder of high purity.