Patents Assigned to Materials CMP Holdings, Inc.
  • Patent number: 7414080
    Abstract: The polishing pad is suitable for planarizing at least one of semiconductor, optical and magnetic substrates. The polishing pad includes a cast polyurethane polymeric material formed with an isocyanate-terminated reaction product formed from a prepolymer reaction of a prepolymer polyol and a polyfunctional isocyanate. The isocyanate-terminated section product has 4.5 to 8.7 weight percent unreacted NCO; and the isocyanate-terminated reaction product is cured with a curative agent selected from the group comprising curative polyamines, curative polyols, curative alcoholamines and mixtures thereof. The polishing pad contains at least 0.1 volume percent filler or porosity.
    Type: Grant
    Filed: January 13, 2005
    Date of Patent: August 19, 2008
    Assignee: Materials CMP Holdings, Inc.
    Inventor: Mary Jo Kulp