Patents Assigned to Mattson Technology IP
  • Processes for treating electronic components
    Patent number: 6491763
    Abstract: A process for treating an electronic component wherein the electronic component is exposed to a heated solvent and subsequently exposed to an ozonated process fluid. The electronic component is optionally exposed to the heated solvent by exposing the electronic component to a passing layer of heated solvent. An apparatus for treating electronic components with a heated solvent and an ozonated process fluid is also provided.
    Type: Grant
    Filed: March 13, 2001
    Date of Patent: December 10, 2002
    Assignee: Mattson Technology IP
    Inventors: Steven Verhaverbeke, Lewis Liu, Alan Walter, C. Wade Sheen, Christopher McConnell