Abstract: The invention relates to positive resist materials of thermally crosslinkable methacrylic polymers soluble in organic solvents, which are characterized in that the methacrylic polymers are copolymers of 80 to 98 mol-% of fluoroalkylmethacrylate and 20 to 2 mol-% of methacrylic acid chloride or chloroalkylmethacrylate. The resists of the invention are very well suited for the transfer of microstructures, for example in semiconductor technology. They have, in addition to a high sensitivity, a very good mechanical stability and strength of adhesion.

Abstract: In a method and system for adjustment of a specimen supported by a specimen upport able to be changed over from one clutch state to another, the specimen is on a specimen table of an electronmicroscope or other corpuscular beam apparatus, and adjustment of the specimen table normal to a longitudinal axis of the apparatus is possible in two coordinate directions. The specimen support is first coupled to the specimen table which is then adjusted such that the specimen is put into a desired position in relation to the apparatus axis. The specimen support then is coupled up with a holding member, which, as long as the specimen support is joined to it, is generally fixed in position. The specimen table is then readjusted into a certain desired position and the specimen support is then again coupled with the specimen table.