Abstract: A sensor arrangement with a silicon-based optical sensor, particularly color sensors for colorimetric applications is disclosed. The invention aims to find a novel possibility for suppressing interference ripples occurring in optical sensors when adding substrates with optically functional coatings which permits a simple production without complicated adaptation layers. The sensor passivation is composed of a combination of thin SiO2 layer in the range of 5 to 10 nm and an antireflection-matched Si3N4 layer and a substrate which carries at least one optical filter is arranged over the sensor passivation and connected to the sensor by means of an adhesive and forms an intermediate space between sensor surface and optical filter which is filled with an optical medium having a low refractive index (n2) and a height variation (?h) over the associated sensor surface.
Type:
Grant
Filed:
May 8, 2014
Date of Patent:
March 14, 2017
Assignee:
MAZeT GmbH
Inventors:
Gunter Siess, Marcus Roeppischer, Wilfried Krueger
Abstract: A sensor arrangement with a silicon-based optical sensor, particularly color sensors for colorimetric applications is disclosed. The invention aims to find a novel possibility for suppressing interference ripples occurring in optical sensors when adding substrates with optically functional coatings which permits a simple production without complicated adaptation layers. The sensor passivation is composed of a combination of thin SiO2 layer in the range of 5 to 10 nm and an antireflection-matched Si3N4 layer and a substrate which carries at least one optical filter is arranged over the sensor passivation and connected to the sensor by means of an adhesive and forms an intermediate space between sensor surface and optical filter which is filled with an optical medium having a low refractive index (n2) and a height variation (?h) over the associated sensor surface.
Type:
Application
Filed:
May 8, 2014
Publication date:
November 20, 2014
Applicant:
MAZeT GmbH
Inventors:
Gunter SIESS, Marcus ROEPPISCHER, Wilfried KRUEGER
Abstract: The invention is directed to a photosensor for color measurement based on three spectral components, particularly for highly accurate color measurement for testing and guaranteeing color constancy in engineered surfaces and consumer articles of any kind.
Type:
Grant
Filed:
February 20, 2004
Date of Patent:
November 7, 2006
Assignee:
MAZeT GmbH
Inventors:
Fred Grunert, Frank Krumbein, Gunter Siess