Abstract: A system for detecting particles in a clean environment includes and ensemble manifold having a plurality of sample ports, a delivery port, and flow junction having no open-close valves or other flow selectors connecting all of said sample ports to said delivery port. In one embodiment, the ensemble manifold is mounted directly on a particle detector using a snap-on connector. A plurality of fluid sources are located in a clean environment, each of the fluid sources fluidically connected to one of the sample ports.

Abstract: The present invention provides an enhanced system and method for compensating for load imbalances of rotating members. An imbalance compensator may have a balancing ring wirelessly controlled by a ring controller. The balancing ring may have a housing containing a plurality of actuators configured to exert force against a compensation ring within the housing. The actuators may move the compensation ring with respect to the axis of rotation of the shaft in a direction substantially opposite the direction of the imbalance. The actuators may directly contact the compensation ring, or may exert the force through the use of mechanical transfer devices that provide a selected mechanical advantage. Alternatively, a chamber containing a magnetic fluid may be used to provide a counterbalancing mass. Particles within the magnetic fluid maybe concentrated opposite the imbalance direction through the use of electromagnets or permanent magnets mounted on movable carts.

Abstract: An apparatus and method for determining the chemical content of a chemical mechanical planarization (CMP) slurry. A CMP sample cell has windows for passing electromagnetic radiation. Three wavelengths of electromagnetic radiation, one of which is strongly absorbed by said CMP slurry and the other two of which are weakly absorbed by said CMP slurry, are directed through said sample cell to a detector, which processes a signal. A processor utilizes the signal to determine the transmission at each wavelength, then utilizes Beer's law to determine a transmission function for each wavelength, and calculates the wavelength dependent particle transmission for each wavelength using an optical model, to form a system of three equations in three unknowns, which are solved to determine a parameter representative of the chemical content of the CMP slurry.

Abstract: Methods and systems for measurement of mechanical properties of elastomeric materials use a driving point impedance head such as a load cell instrumented hammer to apply forces to a force distribution mass positioned over a test specimen upon a rigid base. Broad frequency responses of the driving point impedance head reveal elastic and viscous moduli response frequencies from 0 Hz to 2000 Hz. Methods and systems for measuring responses of elastomeric materials under a preload are also disclosed.

Abstract: A sensitive particle distribution probe uses special processing including a modified Twomey/Chahine iterative convergence technique and a specially constructed sample cell to obtain particle size distribution measurements from optically dense slurries, such as the slurries used in the semiconductor industry for chemical mechanical planarization. Spectral transmission data is taken over the spectral range of 0.20-2.5 microns, utilizing specially constructed, chemically resistant sample cells of 50-2000 microns thickness, and miniature, fixed grating, linear detector array spectrometers. At wavelengths greater than one micron, the preferred design utilizes InGaAs linear detector arrays. An ultrasonic disrupter can be employed to breakup harmless soft agglomerates. In addition to direct particle size distribution measurement, the invention described here could be used to detect other fundamental causes of slurry degradation, such as foaming and jelling.

Abstract: A very sensitive particle distribution probe uses special processing including a modified Twomey/Chahine iterative convergence technique and a specially constructed sample cell to obtain particle size distribution measurements from optically dense slurries, such as the slurries used in the semiconductor industry for chemical mechanical planarization. Spectral transmission data is taken over the spectral range of 0.20-2.5 microns, utilizing specially constructed, chemically resistant sample cells of 50-250 microns thickness, and miniature, fixed grating, linear detector array spectrometers. At wavelengths greater than 1 micron, the preferred design utilizes InGaAs linear detector arrays. An ultrasonic disrupter can be employed to breakup harmless soft agglomerates. In addition to direct particle size distribution measurement, the invention described here could be used to detect other fundamental causes of slurry degradation, such as foaming and jelling.

Abstract: A system and method of generating test code for testing an electronic device on an Automatic Test Equipment (ATE) platform are described. The invention translates scan and pattern test data into test code based upon user defined settings. The test data preferably comes from a test data generation program such as a Scan ATPG or Simulation program, which generates test data. The test data is serially streamed to the invention by the use of function calls embedded in the test data generation program. The user, preferably using a Graphical User Interface (GUI), defines the desired ATE platform type, as well as other custom format features for the output data. The translation, preferably running simultaneously with the test data generation plan, produces the test code as the test data is generated. The user also has the option to generate several different versions of test code simultaneously from the same generation of the test data.

Abstract: The invention includes a particle sensor with a particle counter. A regenerative blower pulls ambient air into a flow within the particle counter, and a laser illuminates the flow to generate laser radiation indicative of particles within the flow. A detector detects the laser radiation; and particle sensing electronics counts particles within the flow at a preselected volumetric flow rate, e.g., 1 CFM. Preferably, the particle counter includes a plurality of pressure sensors; and a blower speed voltage controller adjusts the speed of the blower according to signals from the pressure sensors to achieve the preselected volumetric flow rate. The regenerative blower permits use of a high efficiency exhaust filter to filter air exhausted from the blower. An airflow path between the particle counter and the regenerative blower preferably has at least one bend between the particle counter and the blower to increase compactness of the system.

Abstract: A photographic lighting apparatus for consistent and accurate exposure control of a subject before a camera. The apparatus comprises a plurality of light sources, a power supply; a plurality of switches, and a controller. The switches are connected to the plurality of light sources for selectively providing power from the power supply to the light sources. The controller sequentially operates the switches and has user-programmed operational control for manipulating the light upon the subject to create a desired illuminating effect. This sequencing operation of said controller produces accurate exposure of film within the camera.

Abstract: A system and method for characterizing a surface are disclosed. The system includes a light source and source optics which direct a beam of light toward the surface. A first optical integrating device is positioned and configured to receive a first portion of the scattered light and a second optical integrating device is positioned and configured to receive a second portion of the scattered light. The second optical integrating device reflects the second portion of the scattered light through a segmenting optic. The segmenting optic is configured to segment the second portion of the scattered light to thereby isolate the anisotropic roughness amplitude to one or more segments. A roughness ratio indicative of the anisotropic roughness is produced by comparing the roughness amplitudes of the segments.

Abstract: A gauging apparatus for use with a grinding machine performs dimensional measurements during machining of a workpiece. The gauging apparatus has a sensor head with a single sensor for performing proximity measurements of the workpiece. The sensor head further has vents adjacent to the sensor to vent air to clear working fluids and debris from between the sensor and the surface of the workpiece. A sensor head arm moves the sensor head in radial and tangential directions relative to the workpiece. A computer communicates with the sensor and the sensor head arm to determine, during the machining process, the relative position of the sensor head to the workpiece, the proximity of the sensor to the workpiece, the position of the workpiece, and the dimensions of the workpiece. The gauging apparatus is capable of performing measurements of the workpiece for initial positioning and for precision dimensional measurements.

Abstract: A target device for use in aligning a target station to a reference line-of-sight established by a laser alignment beam is mountably secured to the target station. The target device includes a tooling tube and a beam splitter for reflecting a portion of the alignment beam to a focusing objective. The focusing objective transmits the portion of the alignment beam to a position sensing detector for alignment measurement. The target device is designed to pivot about a target mount center reference point located in the tooling tube. The focusing objective and the beam splitter focus the image of the position sensing detector at the target mount center to produce a virtual image of the position sensing detector at the target mount center. By taking the alignment measurement at the target mount center, inaccurate measurements created by misalignment of the tooling tube with respect to the alignment beam are eliminated.

Abstract: A modified mixing-type condensation nuclei counter for measuring the size and number of small particles is presented. A gas stream is saturated with respect to a working fluid. The saturated gas at a first temperature is mixed in a growth chamber with a sample gas at a second temperature that is lower than the first temperature. The mixture of the saturated gas and the sample gas at different temperatures results in supersaturation of the mixed gas with respect to the working fluid. Particles in the sample gas act as nucleation sites for condensation of the working fluid. The particles are thus grown to a larger size and therefore are more easily measured by known light-scattering particle detection methods. The efficiency of the supersaturation process is made even more efficient by cooling the growth chamber to a third temperature which is lower than the second temperature or by turbulently mixing the saturated gas and the sample gas.

Abstract: A particle detection system in which a beam of light is incident upon an inviscid jet of fluid. A sample fluid containing particles is passed through an inviscid flow producing nozzle. An inviscid flow jet is output from the nozzle. The entire inviscid flow jet moves with uniform velocity and can therefore be contained within the sample region for the detection system. A volumetric measurement is thereby achieved where all of the sample fluid moves with uniform velocity. Sample fluid is decelerated in a deceleration chamber to a velocity significantly less than the nozzle velocity. The nozzle has a length and a width where the ratio of length to width is less than about 1. Sample fluid flows from the deceleration chamber through the nozzle and is output from the nozzle in an inviscid flow jet into a collection chamber. An optical collector system collects light scattered by particles in the inviscid flow jet and images the scattered light on a detector.

Abstract: An angle measurement device capable of providing both linear and non-linear control transfer functions directly using a shaped, generally convex, magnet and linear magnetic sensors, such as Hall sensors. The shape of the magnet is also used to control and optimize the magnitude of the angle measured. This technique of using a special shaped magnet is also used with digital sensors, such as digital Hall switches and arrays.This angle measurement device can be used in many applications requiring an accurate, robust, reliable (including redundant) but inexpensive method to translate angle displacement into a signal voltage or current. Industrial or military hand controllers, such as joysticks, are but one implementation.

Abstract: A system and method for generating testing program code for testing an electronic device on an automatic test equipment (ATE) platform are described. The ATE platform is interconnectable to a testing workstation comprising a processor, memory and input/output facilities. The electronic device under test is removably coupled to the ATE platform. The ATE platform further includes a tester for testing the electronic device responsive to the testing program code. The testing of the electronic device on the ATE platform is controlled by and results from the testing of the electronic device are displayed using the input/output facilities of the testing workstation. A library of ATE platform parameters associated with the testing workstation is maintained and the ATE platform parameters for a plurality of ATE platforms including the ATE platform interconnectable to the testing workstation are stored in the library.

Abstract: A resonant optical cavity having a laser medium therein is positioned within a specific environment, such as a process and/or harsh environment, and a sensing region, also within the resonant optical cavity, receives light whereby particles at the sensing region affect, as by scattering, light at the sensing region. The affected light is optically collected within the specific environment and optically coupled to a processor outside the specific environment where an output is provided that is indicative of particles detected at the sensing region, including small particles having a size at least as small as about 0.05 to 10 microns. With a solid state laser medium utilized within the resonant optical cavity, the solid state laser medium is pumped by an actuator, such as a semiconductor diode laser, providing a light output that is optically coupled to the solid state laser medium.

Abstract: Device and method are disclosed for optically detecting particles in a free (i.e., unenclosed) stream of liquid. The free liquid stream is produced by ejecting liquid under pressure from a nozzle so that the stream has a smooth round surface. A laser beam intersects the free liquid stream and light scattered by particles in the free liquid stream is collected and processed to provide an output indicative of size and/or number of particles causing the light to be scattered. The free liquid stream is preferably directed vertically downward, and the laser beam and light collector are angularly positioned with respect to the free liquid stream and one another with the light collector collecting scattered light at the intersection of the light beam and the free liquid stream.

Abstract: A system and method for characterizing a surface are disclosed. The system includes a light source and source optics which direct a beam of light toward the surface. A first optical integrating device is positioned and configured to receive a first portion of the scattered light which corresponds to a first range of spatial frequencies. A second optical integrating device is positioned and configured to receive a second portion of the scattered light corresponding to a second range of spatial frequencies. In one embodiment, an integrating sphere is employed as the first optical integrating device. The sphere includes a sampling aperture which is surrounded by a light absorption region on the interior of the sphere. Total integrated scatter data is generated for each range of spatial frequencies and is used to approximate the spectral scatter function of the surface. RMS roughness is then approximated for any range of spatial frequencies.

Abstract: A computer-based method and apparatus for fastener hole inspection including a capacitive probe with a plurality of sensor elements, means for grounding the faster hole, and an electronics unit electrically connected to the probe for sequencially charging one of the plurality of sensor elements while applying a guard potential to the remaining sensor elements and adjacent electrical components to eliminate residual capactitances. A profile of the fastener hole is generated by evaluating, through a series resistor, the discharge waveforms of the plurality of sensor elements by converting the capacitance measurements obtained to distance measurements. A centering algorithm is employed to compensate for malalignment of the capacitive probe in the fastener hole.