Patents Assigned to Mega Fluid Systems, Inc.
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Patent number: 11858091Abstract: An apparatus for recirculating fluids in semiconductor systems. The apparatus including a base portion, an inlet portion coupled to a first end of the base portion, and a nozzle coupled to a second end of the base portion. The nozzle including a helical groove extending from a position near a nozzle base portion to a position near a tip of the nozzle portion. The helical groove extending from an exterior surface through the nozzle portion to an interior surface of the nozzle portion. Methods of using the apparatus in a semiconductor recirculation system are also disclosed.Type: GrantFiled: December 20, 2019Date of Patent: January 2, 2024Assignee: Mega Fluid Systems, Inc.Inventors: Robert Eiseler, Koh Murai, Michael Perkins, II
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Publication number: 20200171622Abstract: An apparatus for recirculating fluids in semiconductor systems. The apparatus including a base portion, an inlet portion coupled to a first end of the base portion, and a nozzle coupled to a second end of the base portion. The nozzle including a helical groove extending from a position near a nozzle base portion to a position near a tip of the nozzle portion. The helical groove extending from an exterior surface through the nozzle portion to an interior surface of the nozzle portion. Methods of using the apparatus in a semiconductor recirculation system are also disclosed.Type: ApplicationFiled: December 20, 2019Publication date: June 4, 2020Applicant: Mega Fluid Systems, Inc.Inventors: Robert EISELER, Koh MURAI, Michael PERKINS, II
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Patent number: 8992070Abstract: An improved method and apparatus for blending process materials. Preferred embodiments of the present invention are directed to a process material contacting system to increase wetted surface area for liquid contact as well as increase forced convective mixing efficiency of the liquid mixture. Use of a novel process material contacting apparatus allows one solid feeding element to serve multiple process material tanks, thus reducing overall system costs and decreasing set-up time/process variability while increasing operational efficiency. According to a preferred embodiment of the present invention, rather than adding a process material to a volume of liquid held in a blending tank, the added process material is remotely blended with the liquid outside the process material tank.Type: GrantFiled: December 12, 2013Date of Patent: March 31, 2015
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Patent number: 8746960Abstract: An improved method and apparatus for blending process materials. Preferred embodiments of the present invention are directed to a process material contacting system to increase wetted surface area for liquid contact as well as increase forced convective mixing efficiency of the liquid mixture. Use of a novel process material contacting apparatus allows one solid feeding element to serve multiple process material tanks, thus reducing overall system costs and decreasing set-up time/process variability while increasing operational efficiency. According to a preferred embodiment of the present invention, rather than adding a process material to a volume of liquid held in a blending tank, the added process material is remotely blended with the liquid outside the process material tank.Type: GrantFiled: April 20, 2010Date of Patent: June 10, 2014Assignee: Mega Fluid Systems, Inc.Inventors: David D. Kandiyeli, Quay Issac Gene Williams, Barry Kennedy Cavinaw, Charles Richard Boley, Jr.
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Patent number: 8402998Abstract: Systems and method for delivering materials to a tool are disclosed. A material delivery system utilizes two or more sources of the material to be delivered to the tool. One or more of the sources of the tool may be a batch mixer. The material delivery system also includes at least two material delivery recirculation lines providing material to at tool. The material delivery system may be manually or automatically controlled to switch supply of the material from one source to another, and/or to switch from one material delivery recirculation line to another.Type: GrantFiled: January 12, 2012Date of Patent: March 26, 2013Assignee: Mega Fluid Systems, Inc.Inventors: David Kandiyeli, Todd Graves, Rhey Yang
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Patent number: 8308845Abstract: Systems and methods for processing high purity materials are disclosed. A unit operation processes a material stream, an operational parameter of the unit operation is monitored, and a standby unit is charged with pressurized gas to achieve system pressure. The material stream is diverted to the standby unit in response to the operational parameter of the unit operation registering a threshold value. Flow exiting the standby unit is first vented via an outlet, and then directed toward a point of use after the pressurized gas has been purged. The unit operation may then be serviced and subsequently brought back online. A second unit operation may process a second material stream simultaneously, and the second material stream may be periodically diverted to the standby unit in like manner, thus reducing line pressure variation. The disclosed method may be performed manually or implemented automatically through use of a controller.Type: GrantFiled: August 17, 2010Date of Patent: November 13, 2012Assignee: Mega Fluid Systems, Inc.Inventors: David Kandiyeli, Todd Graves, Rhey Yang
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Publication number: 20120111413Abstract: Systems and method for delivering materials to a tool are disclosed. A material delivery system utilizes two or more sources of the material to be delivered to the tool. One or more of the sources of the tool may be a batch mixer. The material delivery system also includes at least two material delivery recirculation lines providing material to at tool. The material delivery system may be manually or automatically controlled to switch supply of the material from one source to another, and/or to switch from one material delivery recirculation line to another.Type: ApplicationFiled: January 12, 2012Publication date: May 10, 2012Applicant: Mega Fluid Systems, Inc.Inventors: David Kandiyeli, Todd Graves, Rhey Yang
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Patent number: 8113236Abstract: Systems and method for delivering materials to a tool are disclosed. A material delivery system utilizes two or more sources of the material to be delivered to the tool. One or more of the sources of the tool may be a batch mixer. The material delivery system also includes at least two material delivery recirculation lines providing material to at tool. The material delivery system may be manually or automatically controlled to switch supply of the material from one source to another, and/or to switch from one material delivery recirculation line to another.Type: GrantFiled: July 17, 2007Date of Patent: February 14, 2012Assignee: Mega Fluid Systems, Inc.Inventors: David Kandiyeli, Todd Graves, Rhey Yang
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Patent number: 7905653Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.Type: GrantFiled: July 31, 2001Date of Patent: March 15, 2011Assignee: Mega Fluid Systems, Inc.Inventors: Jeffrey Alexander Wilmer, Daniel Kase Mackenzie, John Michael Lull, Eric A. Zadai, Michael Loren Walker
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Patent number: 7799115Abstract: Systems and methods for processing high purity materials are disclosed. A unit operation processes a material stream, an operational parameter of the unit operation is monitored, and a standby unit is charged with pressurized gas to achieve system pressure. The material stream is diverted to the standby unit in response to the operational parameter of the unit operation registering a threshold value. Flow exiting the standby unit is first vented via an outlet, and then directed toward a point of use after the pressurized gas has been purged. The unit operation may then be serviced and subsequently brought back online. A second unit operation may process a second material stream simultaneously, and the second material stream may be periodically diverted to the standby unit in like manner, thus reducing line pressure variation. The disclosed method may be performed manually or implemented automatically through use of a controller.Type: GrantFiled: July 17, 2007Date of Patent: September 21, 2010Assignee: Mega Fluid Systems, Inc.Inventors: David Kandiyeli, Todd Graves, Rhey Yang