Patents Assigned to Mega Fluid Systems, Inc.
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Patent number: 11858091Abstract: An apparatus for recirculating fluids in semiconductor systems. The apparatus including a base portion, an inlet portion coupled to a first end of the base portion, and a nozzle coupled to a second end of the base portion. The nozzle including a helical groove extending from a position near a nozzle base portion to a position near a tip of the nozzle portion. The helical groove extending from an exterior surface through the nozzle portion to an interior surface of the nozzle portion. Methods of using the apparatus in a semiconductor recirculation system are also disclosed.Type: GrantFiled: December 20, 2019Date of Patent: January 2, 2024Assignee: Mega Fluid Systems, Inc.Inventors: Robert Eiseler, Koh Murai, Michael Perkins, II
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Publication number: 20210332924Abstract: Insertion fitting/coupler devices for coupling to a flowpath, and methods of using such insertion fitting/coupler devices, are disclosed. The insertion fitting/coupler devices include a coupler that includes a through hole and a stem portion. The insertion fitting/coupler devices also include a nut that includes a through hole, a rim and a body portion. The insertion fitting/coupler devices further include a body member that includes a through hole and an outer flange. The body member extends into the through hole of the coupler such that an end of the stem portion of the coupler engages the outer flange of the body member. An inner side of the body portion of the nut engages with an outer surface of the stem portion of the coupler such that the flange is secured between the rim of the coupler and the end of the stem portion of the coupler.Type: ApplicationFiled: July 2, 2021Publication date: October 28, 2021Applicant: MEGA FLUID SYSTEMS, INC.Inventors: Todd GRAVES, Kevin CRAIN, David KANDIYELI
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Publication number: 20200171622Abstract: An apparatus for recirculating fluids in semiconductor systems. The apparatus including a base portion, an inlet portion coupled to a first end of the base portion, and a nozzle coupled to a second end of the base portion. The nozzle including a helical groove extending from a position near a nozzle base portion to a position near a tip of the nozzle portion. The helical groove extending from an exterior surface through the nozzle portion to an interior surface of the nozzle portion. Methods of using the apparatus in a semiconductor recirculation system are also disclosed.Type: ApplicationFiled: December 20, 2019Publication date: June 4, 2020Applicant: Mega Fluid Systems, Inc.Inventors: Robert EISELER, Koh MURAI, Michael PERKINS, II
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Patent number: 9459619Abstract: Continuous equipment operation is facilitated despite disablement of an automation controller for controlling the equipment. A safe state in which equipment is to be maintained upon disablement of the automation controller is determined. Safe state data is provided for configuring an I/O module, through which the automation controller controls the equipment, with the safe state data to facilitate maintaining the equipment in the safe state during disablement of the automation controller. In one embodiment, upon subsequent enablement of the automation controller, a current state of the I/O module is evaluated and an automatic control state into which the equipment is to be transitioned is determined. The equipment is then transitioned to the determined automatic control state.Type: GrantFiled: June 29, 2012Date of Patent: October 4, 2016Assignee: MEGA FLUID SYSTEMS, INC.Inventors: Bryan Henry Fletcher, James Andrew Graves, Quay Isaac Gene Williams, David Peter Allen
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Patent number: 9352861Abstract: A vortex reduction cap for use within a fluid holding vessel above a discharge port for discharging the fluid from the vessel is disclosed. The vortex reduction cap includes a top solid surface greater than or equal to the area of the discharge port. The vortex reduction cap includes one or more inlets to allow fluid to flow from the vessel to an internal volume of the vortex reduction cap and then to the discharge port in the vessel. A passive element is positioned within the internal volume of the vortex reduction cap so that the flow of fluids through the cap and towards the discharge port of the vessel will be redirected around the passive element.Type: GrantFiled: December 18, 2012Date of Patent: May 31, 2016Assignee: MEGA FLUID SYSTEMS, INC.Inventors: Koh I. Murai, David D. Kandiyeli
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Patent number: 8992070Abstract: An improved method and apparatus for blending process materials. Preferred embodiments of the present invention are directed to a process material contacting system to increase wetted surface area for liquid contact as well as increase forced convective mixing efficiency of the liquid mixture. Use of a novel process material contacting apparatus allows one solid feeding element to serve multiple process material tanks, thus reducing overall system costs and decreasing set-up time/process variability while increasing operational efficiency. According to a preferred embodiment of the present invention, rather than adding a process material to a volume of liquid held in a blending tank, the added process material is remotely blended with the liquid outside the process material tank.Type: GrantFiled: December 12, 2013Date of Patent: March 31, 2015
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Patent number: 8746960Abstract: An improved method and apparatus for blending process materials. Preferred embodiments of the present invention are directed to a process material contacting system to increase wetted surface area for liquid contact as well as increase forced convective mixing efficiency of the liquid mixture. Use of a novel process material contacting apparatus allows one solid feeding element to serve multiple process material tanks, thus reducing overall system costs and decreasing set-up time/process variability while increasing operational efficiency. According to a preferred embodiment of the present invention, rather than adding a process material to a volume of liquid held in a blending tank, the added process material is remotely blended with the liquid outside the process material tank.Type: GrantFiled: April 20, 2010Date of Patent: June 10, 2014Assignee: Mega Fluid Systems, Inc.Inventors: David D. Kandiyeli, Quay Issac Gene Williams, Barry Kennedy Cavinaw, Charles Richard Boley, Jr.
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Publication number: 20140098628Abstract: An improved method and apparatus for blending process materials. Preferred embodiments of the present invention are directed to a process material contacting system to increase wetted surface area for liquid contact as well as increase forced convective mixing efficiency of the liquid mixture. Use of a novel process material contacting apparatus allows one solid feeding element to serve multiple process material tanks, thus reducing overall system costs and decreasing set-up time/process variability while increasing operational efficiency. According to a preferred embodiment of the present invention, rather than adding a process material to a volume of liquid held in a blending tank, the added process material is remotely blended with the liquid outside the process material tank.Type: ApplicationFiled: December 12, 2013Publication date: April 10, 2014
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Publication number: 20130160878Abstract: A vortex reduction cap for use within a fluid holding vessel above a discharge port for discharging the fluid from the vessel is disclosed. The vortex reduction cap includes a top solid surface greater than or equal to the area of the discharge port. The vortex reduction cap includes one or more inlets to allow fluid to flow from the vessel to an internal volume of the vortex reduction cap and then to the discharge port in the vessel. A passive element is positioned within the internal volume of the vortex reduction cap so that the flow of fluids through the cap and towards the discharge port of the vessel will be redirected around the passive element.Type: ApplicationFiled: December 18, 2012Publication date: June 27, 2013Applicant: MEGA FLUID SYSTEMS, INC.Inventor: MEGA FLUID SYSTEMS, INC.
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Patent number: 8402998Abstract: Systems and method for delivering materials to a tool are disclosed. A material delivery system utilizes two or more sources of the material to be delivered to the tool. One or more of the sources of the tool may be a batch mixer. The material delivery system also includes at least two material delivery recirculation lines providing material to at tool. The material delivery system may be manually or automatically controlled to switch supply of the material from one source to another, and/or to switch from one material delivery recirculation line to another.Type: GrantFiled: January 12, 2012Date of Patent: March 26, 2013Assignee: Mega Fluid Systems, Inc.Inventors: David Kandiyeli, Todd Graves, Rhey Yang
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Publication number: 20130006393Abstract: Continuous equipment operation is facilitated despite disablement of an automation controller for controlling the equipment. A safe state in which equipment is to be maintained upon disablement of the automation controller is determined. Safe state data is provided for configuring an I/O module, through which the automation controller controls the equipment, with the safe state data to facilitate maintaining the equipment in the safe state during disablement of the automation controller. In one embodiment, upon subsequent enablement of the automation controller, a current state of the I/O module is evaluated and an automatic control state into which the equipment is to be transitioned is determined. The equipment is then transitioned to the determined automatic control state.Type: ApplicationFiled: June 29, 2012Publication date: January 3, 2013Applicant: MEGA FLUID SYSTEMS, INC.Inventors: Bryan Henry FLETCHER, James Andrew GRAVES, Quay Isaac Gene WILLIAMS, David Peter ALLEN
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Patent number: 8308845Abstract: Systems and methods for processing high purity materials are disclosed. A unit operation processes a material stream, an operational parameter of the unit operation is monitored, and a standby unit is charged with pressurized gas to achieve system pressure. The material stream is diverted to the standby unit in response to the operational parameter of the unit operation registering a threshold value. Flow exiting the standby unit is first vented via an outlet, and then directed toward a point of use after the pressurized gas has been purged. The unit operation may then be serviced and subsequently brought back online. A second unit operation may process a second material stream simultaneously, and the second material stream may be periodically diverted to the standby unit in like manner, thus reducing line pressure variation. The disclosed method may be performed manually or implemented automatically through use of a controller.Type: GrantFiled: August 17, 2010Date of Patent: November 13, 2012Assignee: Mega Fluid Systems, Inc.Inventors: David Kandiyeli, Todd Graves, Rhey Yang
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Publication number: 20120111413Abstract: Systems and method for delivering materials to a tool are disclosed. A material delivery system utilizes two or more sources of the material to be delivered to the tool. One or more of the sources of the tool may be a batch mixer. The material delivery system also includes at least two material delivery recirculation lines providing material to at tool. The material delivery system may be manually or automatically controlled to switch supply of the material from one source to another, and/or to switch from one material delivery recirculation line to another.Type: ApplicationFiled: January 12, 2012Publication date: May 10, 2012Applicant: Mega Fluid Systems, Inc.Inventors: David Kandiyeli, Todd Graves, Rhey Yang
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Patent number: 8113236Abstract: Systems and method for delivering materials to a tool are disclosed. A material delivery system utilizes two or more sources of the material to be delivered to the tool. One or more of the sources of the tool may be a batch mixer. The material delivery system also includes at least two material delivery recirculation lines providing material to at tool. The material delivery system may be manually or automatically controlled to switch supply of the material from one source to another, and/or to switch from one material delivery recirculation line to another.Type: GrantFiled: July 17, 2007Date of Patent: February 14, 2012Assignee: Mega Fluid Systems, Inc.Inventors: David Kandiyeli, Todd Graves, Rhey Yang
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Publication number: 20110153084Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.Type: ApplicationFiled: February 3, 2011Publication date: June 23, 2011Applicant: MEGA FLUID SYSTEMS, INC.Inventors: Jeffrey Alexander Wilmer, Daniel Kase Mackenzie, John Michael Lull, Eric A. Zadai
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Patent number: 7905653Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.Type: GrantFiled: July 31, 2001Date of Patent: March 15, 2011Assignee: Mega Fluid Systems, Inc.Inventors: Jeffrey Alexander Wilmer, Daniel Kase Mackenzie, John Michael Lull, Eric A. Zadai, Michael Loren Walker
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Publication number: 20100307602Abstract: Systems and methods for processing high purity materials are disclosed. A unit operation processes a material stream, an operational parameter of the unit operation is monitored, and a standby unit is charged with pressurized gas to achieve system pressure. The material stream is diverted to the standby unit in response to the operational parameter of the unit operation registering a threshold value. Flow exiting the standby unit is first vented via an outlet, and then directed toward a point of use after the pressurized gas has been purged. The unit operation may then be serviced and subsequently brought back online. A second unit operation may process a second material stream simultaneously, and the second material stream may be periodically diverted to the standby unit in like manner, thus reducing line pressure variation. The disclosed method may be performed manually or implemented automatically through use of a controller.Type: ApplicationFiled: August 17, 2010Publication date: December 9, 2010Applicant: MEGA FLUID SYSTEMS, INC.Inventors: DAVID KANDIYELI, Todd Graves, Rhey Yang
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Publication number: 20100265788Abstract: An improved method and apparatus for blending process materials. Preferred embodiments of the present invention are directed to a process material contacting system to increase wetted surface area for liquid contact as well as increase forced convective mixing efficiency of the liquid mixture. Use of a novel process material contacting apparatus allows one solid feeding element to serve multiple process material tanks, thus reducing overall system costs and decreasing set-up time/process variability while increasing operational efficiency. According to a preferred embodiment of the present invention, rather than adding a process material to a volume of liquid held in a blending tank, the added process material is remotely blended with the liquid outside the process material tank.Type: ApplicationFiled: April 20, 2010Publication date: October 21, 2010Applicant: MEGA FLUID SYSTEMS, INC.Inventors: DAVID D. KANDIYELI, Quay Issac Gene Williams, Barry Kennedy Cavinaw, Charles Richard Boley, JR.
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Publication number: 20100258196Abstract: A method and apparatus for delivering process materials in a bulk delivery system includes a plurality of pumps arranged in series along a material supply line, wherein the capacity of each pump is such that less than all of the pumps operating simultaneously can provide a desired level of system performance for a given application. In at least one preferred embodiment, a plurality of pumps include three pumps are arranged in series. Preferred embodiments provide several benefits over a parallel arrangement of two larger pumps including, in the case of a single pump failure, that the remaining pumps are signaled to increase speed to restore system performance to restore supply line pressure with less perturbation than that realized in a two-pump, parallel arranged system. Methods are also provided herein for determining which of the three pumps is a failed pump in such a case.Type: ApplicationFiled: April 14, 2010Publication date: October 14, 2010Applicant: MEGA FLUID SYSTEMS, INC.Inventors: Chris MELCER, Jamie A. GRAVES, Bryan FLETCHER, Koh I. MURAI, David D. KANDIYELI
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Patent number: 7799115Abstract: Systems and methods for processing high purity materials are disclosed. A unit operation processes a material stream, an operational parameter of the unit operation is monitored, and a standby unit is charged with pressurized gas to achieve system pressure. The material stream is diverted to the standby unit in response to the operational parameter of the unit operation registering a threshold value. Flow exiting the standby unit is first vented via an outlet, and then directed toward a point of use after the pressurized gas has been purged. The unit operation may then be serviced and subsequently brought back online. A second unit operation may process a second material stream simultaneously, and the second material stream may be periodically diverted to the standby unit in like manner, thus reducing line pressure variation. The disclosed method may be performed manually or implemented automatically through use of a controller.Type: GrantFiled: July 17, 2007Date of Patent: September 21, 2010Assignee: Mega Fluid Systems, Inc.Inventors: David Kandiyeli, Todd Graves, Rhey Yang