Patents Assigned to Mega Fluid Systems, Inc.
  • Patent number: 11858091
    Abstract: An apparatus for recirculating fluids in semiconductor systems. The apparatus including a base portion, an inlet portion coupled to a first end of the base portion, and a nozzle coupled to a second end of the base portion. The nozzle including a helical groove extending from a position near a nozzle base portion to a position near a tip of the nozzle portion. The helical groove extending from an exterior surface through the nozzle portion to an interior surface of the nozzle portion. Methods of using the apparatus in a semiconductor recirculation system are also disclosed.
    Type: Grant
    Filed: December 20, 2019
    Date of Patent: January 2, 2024
    Assignee: Mega Fluid Systems, Inc.
    Inventors: Robert Eiseler, Koh Murai, Michael Perkins, II
  • Publication number: 20200171622
    Abstract: An apparatus for recirculating fluids in semiconductor systems. The apparatus including a base portion, an inlet portion coupled to a first end of the base portion, and a nozzle coupled to a second end of the base portion. The nozzle including a helical groove extending from a position near a nozzle base portion to a position near a tip of the nozzle portion. The helical groove extending from an exterior surface through the nozzle portion to an interior surface of the nozzle portion. Methods of using the apparatus in a semiconductor recirculation system are also disclosed.
    Type: Application
    Filed: December 20, 2019
    Publication date: June 4, 2020
    Applicant: Mega Fluid Systems, Inc.
    Inventors: Robert EISELER, Koh MURAI, Michael PERKINS, II
  • Patent number: 8992070
    Abstract: An improved method and apparatus for blending process materials. Preferred embodiments of the present invention are directed to a process material contacting system to increase wetted surface area for liquid contact as well as increase forced convective mixing efficiency of the liquid mixture. Use of a novel process material contacting apparatus allows one solid feeding element to serve multiple process material tanks, thus reducing overall system costs and decreasing set-up time/process variability while increasing operational efficiency. According to a preferred embodiment of the present invention, rather than adding a process material to a volume of liquid held in a blending tank, the added process material is remotely blended with the liquid outside the process material tank.
    Type: Grant
    Filed: December 12, 2013
    Date of Patent: March 31, 2015
  • Patent number: 8746960
    Abstract: An improved method and apparatus for blending process materials. Preferred embodiments of the present invention are directed to a process material contacting system to increase wetted surface area for liquid contact as well as increase forced convective mixing efficiency of the liquid mixture. Use of a novel process material contacting apparatus allows one solid feeding element to serve multiple process material tanks, thus reducing overall system costs and decreasing set-up time/process variability while increasing operational efficiency. According to a preferred embodiment of the present invention, rather than adding a process material to a volume of liquid held in a blending tank, the added process material is remotely blended with the liquid outside the process material tank.
    Type: Grant
    Filed: April 20, 2010
    Date of Patent: June 10, 2014
    Assignee: Mega Fluid Systems, Inc.
    Inventors: David D. Kandiyeli, Quay Issac Gene Williams, Barry Kennedy Cavinaw, Charles Richard Boley, Jr.
  • Patent number: 8402998
    Abstract: Systems and method for delivering materials to a tool are disclosed. A material delivery system utilizes two or more sources of the material to be delivered to the tool. One or more of the sources of the tool may be a batch mixer. The material delivery system also includes at least two material delivery recirculation lines providing material to at tool. The material delivery system may be manually or automatically controlled to switch supply of the material from one source to another, and/or to switch from one material delivery recirculation line to another.
    Type: Grant
    Filed: January 12, 2012
    Date of Patent: March 26, 2013
    Assignee: Mega Fluid Systems, Inc.
    Inventors: David Kandiyeli, Todd Graves, Rhey Yang
  • Patent number: 8308845
    Abstract: Systems and methods for processing high purity materials are disclosed. A unit operation processes a material stream, an operational parameter of the unit operation is monitored, and a standby unit is charged with pressurized gas to achieve system pressure. The material stream is diverted to the standby unit in response to the operational parameter of the unit operation registering a threshold value. Flow exiting the standby unit is first vented via an outlet, and then directed toward a point of use after the pressurized gas has been purged. The unit operation may then be serviced and subsequently brought back online. A second unit operation may process a second material stream simultaneously, and the second material stream may be periodically diverted to the standby unit in like manner, thus reducing line pressure variation. The disclosed method may be performed manually or implemented automatically through use of a controller.
    Type: Grant
    Filed: August 17, 2010
    Date of Patent: November 13, 2012
    Assignee: Mega Fluid Systems, Inc.
    Inventors: David Kandiyeli, Todd Graves, Rhey Yang
  • Publication number: 20120111413
    Abstract: Systems and method for delivering materials to a tool are disclosed. A material delivery system utilizes two or more sources of the material to be delivered to the tool. One or more of the sources of the tool may be a batch mixer. The material delivery system also includes at least two material delivery recirculation lines providing material to at tool. The material delivery system may be manually or automatically controlled to switch supply of the material from one source to another, and/or to switch from one material delivery recirculation line to another.
    Type: Application
    Filed: January 12, 2012
    Publication date: May 10, 2012
    Applicant: Mega Fluid Systems, Inc.
    Inventors: David Kandiyeli, Todd Graves, Rhey Yang
  • Patent number: 8113236
    Abstract: Systems and method for delivering materials to a tool are disclosed. A material delivery system utilizes two or more sources of the material to be delivered to the tool. One or more of the sources of the tool may be a batch mixer. The material delivery system also includes at least two material delivery recirculation lines providing material to at tool. The material delivery system may be manually or automatically controlled to switch supply of the material from one source to another, and/or to switch from one material delivery recirculation line to another.
    Type: Grant
    Filed: July 17, 2007
    Date of Patent: February 14, 2012
    Assignee: Mega Fluid Systems, Inc.
    Inventors: David Kandiyeli, Todd Graves, Rhey Yang
  • Patent number: 7905653
    Abstract: A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.
    Type: Grant
    Filed: July 31, 2001
    Date of Patent: March 15, 2011
    Assignee: Mega Fluid Systems, Inc.
    Inventors: Jeffrey Alexander Wilmer, Daniel Kase Mackenzie, John Michael Lull, Eric A. Zadai, Michael Loren Walker
  • Patent number: 7799115
    Abstract: Systems and methods for processing high purity materials are disclosed. A unit operation processes a material stream, an operational parameter of the unit operation is monitored, and a standby unit is charged with pressurized gas to achieve system pressure. The material stream is diverted to the standby unit in response to the operational parameter of the unit operation registering a threshold value. Flow exiting the standby unit is first vented via an outlet, and then directed toward a point of use after the pressurized gas has been purged. The unit operation may then be serviced and subsequently brought back online. A second unit operation may process a second material stream simultaneously, and the second material stream may be periodically diverted to the standby unit in like manner, thus reducing line pressure variation. The disclosed method may be performed manually or implemented automatically through use of a controller.
    Type: Grant
    Filed: July 17, 2007
    Date of Patent: September 21, 2010
    Assignee: Mega Fluid Systems, Inc.
    Inventors: David Kandiyeli, Todd Graves, Rhey Yang