Patents Assigned to Megasonic Sweeping, Inc.
  • Megasonic processing apparatus with frequency sweeping of thickness mode transducers
    Patent number: 8310131
    Abstract: A megasonic processing apparatus and method has one or more piezoelectric transducers operating in thickness mode at fundamental resonant frequencies of at least 300 KHz. A generator powers the transducers with a variable-frequency driving signal that varies or sweeps throughout a predetermined sweep frequency range. The generator repeatedly vanes or sweeps the frequency of the driving signal through a sweep frequency range that includes the resonant frequencies of all the transducers.
    Type: Grant
    Filed: October 2, 2009
    Date of Patent: November 13, 2012
    Assignee: Megasonic Sweeping, Inc.
    Inventor: J. Michael Goodson