Patents Assigned to Memscap and Planheas-Silmag PHS
  • Patent number: 6444488
    Abstract: Process for fabricating electronic components, of the variable capacitor or microswitch type, comprising a fixed plate (1) and a deformable membrane (20) which are located opposite each other, which comprises the following steps, consisting in: depositing a first metal layer on an oxide layer (2), said first metal layer being intended to form the fixed plate; depositing a metal ribbon (10, 11) on at least part of the periphery and on each side of the fixed plate (1), said ribbon being intended to serve as a spacer between the fixed plate (1) and the deformable membrane (20); depositing a sacrificial resin layer (15) over at least the area of said fixed plate (1); generating, by lithography, a plurality of wells in the surface of said sacrificial resin layer; depositing, by electrolysis, inside the wells formed in the sacrificial resin (15), at least one metal region intended to form the deformable membrane (20), this metal region extending between sections of the metal ribbon (10, 11) which are located o
    Type: Grant
    Filed: May 15, 2001
    Date of Patent: September 3, 2002
    Assignee: Memscap and Planheas-Silmag PHS
    Inventors: Catherine Charrier, Eric Bouchon, Alain Campo, Guy Imbert, François Valentin, Laurent Basteres