Abstract: A microelectromechanical component (1) providing filtering functions, produced on a semiconductor-based substrate (10) and comprising two input terminals (7, 8) and two output terminals (26, 27), which also comprises:
Type:
Application
Filed:
August 6, 2002
Publication date:
February 13, 2003
Applicant:
MEMSCAP Parc Technologique des Fontaines