Abstract: The invention is directed to a touch probing device for inspecting an object which includes a fixed part, movable part coupled to and movable with respect to the fixed part for measuring the motion between the fixed and the movable parts, and a contact means coupled to the movable part for contacting a surface of the object. The contact means is preferably coupled to the movable part via a shock absorber. Alternatively, or in addition weight compensating means are provided for compensating the weight of the movable part. The weight compensating means preferably uses a magnetic field for compensating the weight of the movable part.