Abstract: Silica based compositions that may be used coatings, films or other cast structures, as well as related methods and resulting structures are provided. In one embodiment, a hybrid nanosilica (HNS) composition includes tetraethylorthosilicate (TEOS), methyl triethoxysilane (MTEOS) and glycidoxypropyltrimethoxysilane (GPTMS). The composition may be used as a coating to provide various types of protection and device performance enhancement. For example, the composition may be used for impact protection or corrosion resistance. In one particular embodiment, optically enhancing nanoparticles may be dispersed throughout the HNS material and used as an antireflective coating (ARC) for various optical purposes.