Patents Assigned to MetOx Technologies, Inc.
  • Solid precursor feed system for thin film depositions
    Patent number: 11781216
    Abstract: A dry powder MOCVD vapor source system is disclosed that utilizes a gravimetric powder feeder, a feed rate measurement and feeder control system, an evaporator and a load lock system for continuous operation for thin film production, particularly of REBCO type high temperature superconductor (HTS) tapes.
    Type: Grant
    Filed: January 13, 2023
    Date of Patent: October 10, 2023
    Assignee: MetOx Technologies, Inc.
    Inventors: Mikhail Novozhilov, Alex Ignatiev
  • Solid precursor feed system for thin film depositions
    Patent number: 11584988
    Abstract: A dry powder MOCVD vapor source system is disclosed that utilizes a gravimetric powder feeder, a feed rate measurement and feeder control system, an evaporator and a load lock system for continuous operation for thin film production, particularly of REBCO type high temperature superconductor (HTS) tapes.
    Type: Grant
    Filed: September 27, 2021
    Date of Patent: February 21, 2023
    Assignee: MetOx Technologies, Inc.
    Inventors: Mikhail Novozhilov, Alex Ignatiev
  • Solid precursor feed system for thin film depositions
    Patent number: 11162171
    Abstract: A dry powder MOCVD vapor source system is disclosed that utilizes a gravimetric powder feeder, a feed rate measurement and feeder control system, an evaporator and a load lock system for continuous operation for thin film production, particularly of REBCO type high temperature superconductor (HTS) tapes.
    Type: Grant
    Filed: December 21, 2019
    Date of Patent: November 2, 2021
    Assignee: MetOx Technologies, Inc.
    Inventors: Mikhail Novozhilov, Alex Ignatiev