Patents Assigned to METROALASER, INC.
  • Optical Inspection Using Spatial Light Modulation
    Publication number: 20110026033
    Abstract: A Hartmann inspection system is provided that includes, comprising: a laser source; and a spatial light modulator (SLM) configured to form at least one aperture to form an object beam for inspecting an object, wherein the SLM is further configured to modulate the aperture with a diffraction grating.
    Type: Application
    Filed: December 21, 2009
    Publication date: February 3, 2011
    Applicant: METROALASER, INC.
    Inventors: James D. Trolinger, Amit K. Lal, Joshua Jo, Stephen Kupiec