Abstract: A heater head may include a heater head unit having a vacuum conduit hole formed in an external surface thereof; a heater insulation block disposed in a lower portion of the heater head unit; a heater base unit disposed in a lower portion of the heater insulation block; a first vacuum conduit communicating from the vacuum conduit hole of the heater head unit to the heater insulation block and the heater base unit in an arrangement direction of the heater head unit, the heater insulation block and the heater base unit; a second vacuum conduit extending into the heater base unit in a portion of an outer side of the heater base unit and communicating with the first vacuum conduit; and a conduit bushing inserted into at least one of the first vacuum conduit and the second vacuum conduit and forming a vacuum conduit.

Abstract: Proposed is an yttrium-based granular powder for thermal spraying. The yttrium-based granular powder includes at least one yttrium compound powder selected from the group consisting of Y2O3, YOF, YF3, Y4Al2O9, Y3Al5O12, and YAlO3, and a silica (SiO2) powder. The yttrium-based granular powder is prepared by mixing the yttrium compound powder having a mean grain diameter of 50 nm to 900 nm and the silica powder having a mean grain diameter of 50 nm to 900 nm. The yttrium-based granular powder includes less than 10 wt % of a Y—Si—O mesophase. A thermal spray coating produced using the yttrium-based granular powder can exhibit low porosity, high density, and excellent plasma resistance.

Abstract: A fuel-cell system is disclosed. The fuel cell system includes: a system module having one or more fuel-cell stacks, a first reformer for converting at least some of hydrocarbon fuel into hydrogen, and supplying the hydrogen to the fuel-cell stacks, and a housing for receiving the fuel-cell stacks, and the first reformer therein; and a start-up module disposed outside the housing, and removably coupled to the system module, wherein the start-up module supplies hydrogen-containing fuel to the fuel-cell stacks until a temperature of the fuel-cell stack reaches a predetermined temperature.

Abstract: A fuel cell stack array is disclosed. The fuel cell stack array includes a first fuel cell stack having a first upper frame structure formed with a first through-hole for exposing a first topmost connector layer positioned at top of a first single cell stack structure, a second fuel cell stack having a second upper frame structure formed with a second through-hole for exposing a second topmost connector layer positioned at top of a second single cell stack structure, and a first current collector electrically connecting the first and second topmost connector layers via the first and second through-holes.

Abstract: The present invention relates to a substrate heating apparatus. More specifically, the present invention relates to a substrate heating apparatus including a first heating element located in an inner region of the substrate heating apparatus, a second heating element located in an outer region, and a third heating element supplying current to the second heating element passing through the inner region, wherein the diameter of a wire constituting the third heating element is thicker than the diameter of a wire constituting the second heating element, thereby inhibiting the generation of an overheating region by the heating of the third heating element.