Abstract: A micro-electromechanical structure for modulating light beams includes multiple asymmetric deformable diffractive elements, each having an L-shaped cross section, split pedestal and flexible reflective member. The reflective member has an elongated shape, and a supported part and unsupported part. The split pedestal extends along the long dimension of the supported part of the reflective member and is anchored to a substrate which supports one or more electrodes or serves as an electrode. The diffractive element is movable between a non-energized position wherein the diffractive element acts to reflect a beam of light as a planar mirror, to an energized position wherein upon application of an electrostatic force, the diffractive element flexes independently about an axis parallel to the long dimension of each reflective member to vary a curvature of the reflective member to form a blazed grating.

Abstract: The invention relates generally to use of a silicon oxynitride film which exhibits desirable physical and chemical properties; superiority in adhesion to metals including noble metals and other metals, transparent conductive oxides, and semiconductor materials compared to silicon dioxide and silicon nitride; is wet-etchable, dry-etchable, or both; and operates as a high-performance overcoat barrier dielectric. The silicon oxynitride film meets performance requirements via a process that does not require an adhesion layer for deposition, and does not contaminate, obscure, or damage the device through incorporation or processing of additional adhesion layers.

Abstract: The invention relates generally to use of a silicon oxynitride film which exhibits desirable physical and chemical properties; superiority in adhesion to metals including noble metals and other metals, transparent conductive oxides, and semiconductor materials compared to silicon dioxide and silicon nitride; is wet-etchable, dry-etchable, or both; and operates as a high-performance overcoat barrier dielectric. The silicon oxynitride film meets performance requirements via a process that does not require an adhesion layer for deposition, and does not contaminate, obscure, or damage the device through incorporation or processing of additional adhesion layers.

Abstract: A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.

Abstract: Methods of fabricating semiconductor sensor devices include steps of fabricating a hermetically sealed MEMS cavity enclosing a MEMS sensor, while forming conductive vias through the device. The devices include a first semi-conductor layer defining at least one conductive via lined with an insulator and having a lower insulating surface; a central dielectric layer above the first semiconductor layer; a second semiconductor layer in contact with the at least one conductive via, and which defines a MEMS cavity; a third semiconductor layer disposed above the second semiconductor layer, and which includes a sensor element aligned with the MEMS cavity; a cap bonded to the third semiconductor to enclose and hermetically seal the MEMS cavity; wherein the third semiconductor layer separates the cap and the second semiconductor layer.

Abstract: A multi-layer stacked micro-electro-mechanical (MEMS) device that acts as a capacitive micromachined ultrasonic transducer (CMUT) with a hermetically sealed device cavity formed by a wafer bonding process with semiconductor and insulator layers. The CMUT design uses a doped Si SOI and wafer bonding fabrication method, and is composed of semiconductor layers, insulator layers, and metal layers. Conventional doped silicon may be used for electrode layers. Other suitable semi-conductor materials such as silicon carbide may be used for the electrode layers. The insulator may be silicon oxide, silicon nitride or other suitable dielectric.

Abstract: A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.

Abstract: Methods of fabricating semiconductor sensor devices include steps of fabricating a hermetically sealed MEMS cavity enclosing a MEMS sensor, while forming conductive vias through the device. The devices include a first semi-conductor layer defining at least one conductive via lined with an insulator and having a lower insulating surface; a central dielectric layer above the first semiconductor layer; a second semiconductor layer in contact with the at least one conductive via, and which defines a MEMS cavity; a third semiconductor layer disposed above the second semiconductor layer, and which includes a sensor element aligned with the MEMS cavity; a cap bonded to the third semiconductor to enclose and hermetically seal the MEMS cavity; wherein the third semiconductor layer separates the cap and the second semiconductor layer.

Abstract: A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.

Abstract: A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.

Abstract: Methods of fabricating semiconductor sensor devices include steps of fabricating a hermetically sealed MEMS cavity enclosing a MEMS sensor, while forming conductive vias through the device. The devices include a first semi-conductor layer defining at least one conductive via lined with an insulator and having a lower insulating surface; a central dielectric layer above the first semiconductor layer; a second semiconductor layer in contact with the at least one conductive via, and which defines a MEMS cavity; a third semiconductor layer disposed above the second semiconductor layer, and which includes a sensor element aligned with the MEMS cavity; a cap bonded to the third semiconductor to enclose and hermetically seal the MEMS cavity; wherein the third semiconductor layer separates the cap and the second semiconductor layer.

Abstract: A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.

Abstract: A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.

Abstract: A microfluidic rotary valve and methods of manufacturing same are disclosed. The rotary valve includes a stator chip having at least one inlet and at least one outlet. The rotary valve also includes a rotor having at least one rotor channel in sealed engagement with the stator chip. The rotor rotates between valve positions preventing and allowing fluid communication between the inlets and outlets by way of the rotor channels and according to the design of the inlets, outlets and rotor channels. The stator chip includes a first planar substrate having a contact face and a second planar substrate having a contact face bonded to the contact face of the first planar substrate. The first planar substrate defines a first portion of the inlet and outlet, and the second planar substrate defines a second portion of the inlet and outlet.

Abstract: A method of controlling fluid flow in a channel in a microfluidic flow control device by introducing fluid to the channel, with the fluid flowing in a flow direction and controllably deforming material defining the channel in a direction perpendicular to the flow direction to control fluid flow in the channel. The channel is formed between a first plate and a second plate and controllably deforming material defining the channel comprises deforming at least one of the first and second plates. Material defining the channel extends continuously between an inlet port and an outlet port. Controllably deforming material defining the channel preferably comprises deforming the first plate into contact with a seat formed in the second plate to close the channel. The seat may be formed by a ridge having a smoothly changing profile in section across the channel. The method may be operated to generate a pumping, filtering, trapping or mixing function. Apparatus for carrying out the method is also disclosed.

Abstract: A bead trapping device for trapping beads. The device is formed from a substrate, posts extending from the substrate; the posts being patterned to form cavities between the posts, the cavities having a diameter between 0.5 &mgr;m and 200 &mgr;m; and means for loading beads onto the substrate. A method of trapping microscopic beads for analysis, the method comprising the steps of contacting a fluid containing beads with a substrate having posts extending from the substrate to form bead trapping cavities, the bead trapping cavities having a diameter between 0.5 &mgr;m and 200 &mgr;m; and loading the beads into the bead trapping cavities.

Abstract: A method of controlling fluid flow in a channel in a microfluidic flow control device by introducing fluid to the channel, with the fluid flowing in a flow direction and controllably deforming material defining the channel in a direction perpendicular to the flow direction to control fluid flow in the channel. The channel is formed between a first plate and a second plate and controllably deforming material defining the channel comprises deforming at least one of the first and second plates. Material defining the channel extends continuously between an inlet port and an outlet port. Controllably deforming material defining the channel preferably comprises deforming the first plate into contact with a seat formed in the second plate to close the channel. The seat may be formed by a ridge having a smoothly changing profile in section across the channel. The method may be operated to generate a pumping, filtering, trapping or mixing function. Apparatus for carrying out the method is also disclosed.

Abstract: A method of controlling flow of a driven fluid in a channel, the channel being defined by an encircling wall, the method comprising the steps of sealing the channel with a sealing fluid immiscible in the driven fluid blocking the channel at an initial position, in which the sealing fluid has a first contact angle with the encircling wall and the driven fluid has a second contact angle with the encircling wall and the first contact angle is less than the second contact angle; and moving the sealing fluid in the channel by a force generated outside of the channel.

Abstract: A microanalysis system, comprising a microchip, a common well in the microchip, and multiple wells in the microchip, each of the multiple wells being connected for fluid flow to the common well by a channel. The common well is a waste well, and the multiple wells are sample introduction wells. The common well is at the center of the microchip. The channels radiate outward from the common well, and are equally circumferentially spaced. A buffer introduction channel is provided that intersects each of the channels.

Abstract: A microfluidic device operates as a pump for pumping fluid along a channel in a microchip by moving a drive fluid in the channel under the influence of a force field that is generated externally to the channel. The drive fluid is preferably a ferrofluid, and the force field is preferably a variable magnetic field. Drive fluid, driven by variation of the magnetic field, drives driven fluid through the channel. The drive fluid is recirculated, in one case by rotating the drive fluid within an enlargement in the channel, and in another case by returning the drive fluid along a return channel. A valve is formed by using a ferrofluid plug as a movable barrier for fluids in a channel. The microfluid device may be formed between two plates forming a microchip. The channels may be as small as 1 &mgr;m to 100 &mgr;m. Methods of pumping fluids by using an in channel drive fluid and exterior drive are also disclosed.