Abstract: A thin film microstructure is formed from a substrate having a film of vapor deposited material extending in distinct helical columns from the substrate. The distinct helical columns may terminate distally from the substrate in a region of denser material forming a cap for the helical columns. The cap and substrate may be each connected, respectively, to first and second electrodes, and may operate in conjunction with an acoustic wave sensor.
Type:
Grant
Filed:
November 12, 1998
Date of Patent:
June 19, 2001
Assignee:
Micralyne Inc.
Inventors:
Kevin John Robbie, Michael Julian Brett
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