Abstract: The present invention provides a method and apparatus for testing semiconductor wafers that is simple and allows testing prior to dicing so that the need to temporarily package individual dies for testing is eliminated. As a result, the number of manufacturing steps is reduced, thus increasing first pass yields. In addition, manufacturing time is decreased, thereby improving cycle times and avoiding additional costs. After testing, the wafer is diced into the individual circuits, eliminating the need for additional packaging. One form of the present invention provides an interposer substrate made of a ceramic material that has an upper and a lower surface. There are one or more first electrical contacts on the lower surface and one or more second electrical contacts on the upper surface. There are also one or more electrical pathways that connect the first and second electrical contacts.

Abstract: The present invention comprises various embodiments of an apparatus and method for electrically testing an integrated circuit wafer interposer assembly. In certain embodiments, the wafer interposer assembly is fixed into a positioning device and moved over a test head to precisely align the contact pads for one device with the contacts of the test head. In certain embodiments, the positioning device facilitates temperature controlled testing of the wafer. In certain embodiments, multiple devices can be tested simultaneously in parallel.

Abstract: The present invention provides a wafer interposer for electrical testing and assembly into a conventional package. The present invention provides an interposer comprising a support having an upper and a lower surface. One or more solder bumps are on the lower surface. One or more first electrical terminals are on the upper surface, substantially corresponding to the position of the solder bumps, and forming a pattern. One or more first electrical pathways pass through the surface of the support and connect the solder bumps to the first electrical terminals. One or more second electrical terminals are on the upper surface of the support. The second electrical terminals are larger in size and pitch than the first electrical terminals, and they are located within the pattern formed by the first electrical terminals. One or more second electrical pathways connect the first electrical pathways to the second electrical pathway.