Abstract: A thermal control system for use with a burn-in system, the thermal control system capable of delivering a thermally preconditioned liquid to a plurality of semiconductor devices during burn-in. The thermal control system comprises a liquid reservoir containing a liquid, a pump, and a plurality of spray nozzle arrays. The liquid contained in the liquid reservoir is thermally preconditioned through the use of a heating element and a cooling element and the temperature of the liquid provided to each spray nozzle array is individually controlled through the use of a pipe heating element. The liquid is collected and returned to the liquid reservoir after being sprayed on the semiconductor devices.

Abstract: A three dimensional graphics tablet for determining the three dimensional coordinates of points on an object placed on a supporting plane. The apparatus includes an articulated arm having at least two link elements connecting a contacting tip element to the support for rotational movement about a plurality of mutually angulated axes. By means of the arm articulation, the contacting tip element can be moved to arbitrary locations within a defined volume. Potentiometers are provided for measuring each of the angles of rotation about the mutually angulated axes. These potentiometers generate signals which collectively determine the coordinates of the location of the tip element. Embodiments are disclosed having three and four degrees of freedom and a portable embodiment including a clamp or bracket are disclosed.

Abstract: A three dimensional graphics tablet for determining the three dimensional coordinates of points on an object placed on a supporting plane. The apparatus includes an articulated arm having at least two link elements connecting a contacting tip element to the support for rotational movement about a plurality of mutually angulated axes. By means of the arm articulation, the contacting tip element can be moved to arbitrary locations within a defined volume. Potentiometers are provided for measuring each of the angles of rotation about the mutually angulated axes. These potentiometers generate signals which collectively determine the coordinates of the location of the tip element. Embodiments are disclosed having three and four degrees of freedom.