Patents Assigned to Micro Control System
  • Patent number: 5515910
    Abstract: A thermal control system for use with a burn-in system, the thermal control system capable of delivering a thermally preconditioned liquid to a plurality of semiconductor devices during burn-in. The thermal control system comprises a liquid reservoir containing a liquid, a pump, and a plurality of spray nozzle arrays. The liquid contained in the liquid reservoir is thermally preconditioned through the use of a heating element and a cooling element and the temperature of the liquid provided to each spray nozzle array is individually controlled through the use of a pipe heating element. The liquid is collected and returned to the liquid reservoir after being sprayed on the semiconductor devices.
    Type: Grant
    Filed: May 3, 1993
    Date of Patent: May 14, 1996
    Assignee: Micro Control System
    Inventors: Harold E. Hamilton, Brian R. Bloch, James R. Zimmer