Abstract: A generating device that includes: a unit for generating triggering positions, a unit for generating, during the course of the movement of the moving element, actual positions of said moving element, this unit further including a unit for measuring successive effective positions of the moving element, the actual positions including at least these measured effective positions, a unit for comparing, for a current triggering position, the actual positions successive to this current triggering position in such a way as to identify, among these successive actual positions, the closest actual position to said current triggering position, and this within a given limit, and a unit for generating a pulsed signal for the current triggering position, if and when the moving element reaches said closest actual position and that this position is situated within the given limit.

Abstract: A method for compensating for accuracy errors of a hexapod is disclosed, said hexapod comprising a base, an actuation assembly having six linear translation actuators, a control unit, and a movable carriage comprising a platform connected to the base by means of the actuation assembly. The method includes a measurement step for determining geometry and positioning errors on the hexapod, the measurement step including sub-steps for determining positioning errors of the pivot centers on the carriage and on the base, for determining length errors of the actuators and for measuring positioning errors of the actuators along the path thereof, the compensation method also including a step for calculating, from measurements taken, error compensation values and a step for applying said error compensation values to the control unit of the hexapod, during subsequent use of said hexapod.

Abstract: A generating device that includes: a unit for generating triggering positions, a unit for generating, during the course of the movement of the moving element, actual positions of said moving element, this unit further including a unit for measuring successive effective positions of the moving element, the actual positions including at least these measured effective positions, a unit for comparing, for a current triggering position, the actual positions successive to this current triggering position in such a way as to identify, among these successive actual positions, the closest actual position to said current triggering position, and this within a given limit, and a unit for generating a pulsed signal for the current triggering position, if and when the moving element reaches said closest actual position and that this position is situated within the given limit.

Abstract: The invention relates to a system (1) for moving a support plate (2), the support plate (2) being, in a so-called neutral position, substantially parallel to an XY plane defined by a so-called X direction and a so-called Y direction, said system comprising at least two control stages (E1, E2) which are superimposed in a direction Z orthogonal to said X and Y directions, the two control stages (E1, E2) being secured to each other, at least one of said control stages (E1, E2) comprising a control module (M1, M2), the control module (M1, M2) comprising only movement units designed so as to each generate a translational movement in an XY plane, respectively in different directions.

Abstract: The invention relates to a system (1) for moving a support plate (2), the support plate (2) being, in a so-called neutral position, substantially parallel to an XY plane defined by a so-called X direction and a so-called Y direction, said system comprising at least two control stages (E1, E2) which are superimposed in a direction Z orthogonal to said X and Y directions, the two control stages (E1, E2) being secured to each other, at least one of said control stages (E1, E2) comprising a control module (M1, M2), the control module (M1, M2) comprising only movement units designed so as to each generate a translational movement in an XY plane, respectively in different directions.

Abstract: A method for compensating for accuracy errors of a hexapod is disclosed, said hexapod comprising a base, an actuation assembly having six linear translation actuators, a control unit, and a movable carriage comprising a platform connected to the base by means of the actuation assembly. The method includes a measurement step for determining geometry and positioning errors on the hexapod, the measurement step including sub-steps for determining positioning errors of the pivot centers on the carriage and on the base, for determining length errors of the actuators and for measuring positioning errors of the actuators along the path thereof, the compensation method also including a step for calculating, from measurements taken, error compensation values and a step for applying said error compensation values to the control unit of the hexapod, during subsequent use of said hexapod.

Abstract: A driving device for driving in rotation a toothed wheel, in particular a turntable, has a worm intended to mesh with the toothed wheel, a motor to drive the worm in rotation, a flexible sleeve that partially surrounds the worm in such a way as to form an assembly described as a worm/sleeve assembly, and a pre-stressing unit. The motor is arranged in a structure that is fitted pivotably relative to the worm/sleeve assembly, and the driving device also has a force transfer unit connecting the motor to the sleeve at a second extremity of the worm.

Abstract: A system provides for relative movement between two plates that are substantially parallel to a plane defined by a first direction and a second direction. The system includes a first unit that is configured to allow a relative movement between the two plates in a third direction that is orthogonal to the plane. The first unit also independently prevents a relative movement between the two plates in the plane. The system further includes a second unit that is configured to allow one plate to relatively travel with respect to the other plate about the first and second directions.

Abstract: Device for the translational guidance of a load and method for creating such a device. The guide device (1) comprises an elongate bed plate (2), a mobile carriage (6) which serves to support the load, and guide means (7) that allow the carriage (6) to move longitudinally in relation to the bed plate (2), said carriage (6) comprising a bottom plate (9) which is provided with through-cuts (10) intended to give it at least some lateral elasticity, and which is mounted on the bed plate (2) under lateral stress, as well as a platform (13) which is fixed to the top face of this bottom plate (9) at fixing points (14).

Abstract: A driving device for driving in rotation a toothed wheel, in particular a turntable, has a worm intended to mesh with the toothed wheel, a motor to drive the worm in rotation, a flexible sleeve that partially surrounds the worm in such a way as to form an assembly described as a worm/sleeve assembly, and a pre-stressing unit. The motor is arranged in a structure that is fitted pivotably relative to the worm/sleeve assembly, and the driving device also has a force transfer unit connecting the motor to the sleeve at a second extremity of the worm.

Abstract: Device for the translational guidance of a load and method for creating such a device. The guide device (1) comprises an elongate bed plate (2), a mobile carriage (6) which serves to support the load, and guide means (7) that allow the carriage (6) to move longitudinally in relation to the bed plate (2), said carriage (6) comprising a bottom plate (9) which is provided with through-cuts (10) intended to give it at least some lateral elasticity, and which is mounted on the bed plate (2) under lateral stress, as well as a platform (13) which is fixed to the top face of this bottom plate (9) at fixing points (14).

Abstract: Method for optically measuring submicron dimensions of an object or covering between two objects, and device implementing such method, wherein a light beam (23) is emitted by means of an arc lamp (22) into a system (21) with an optical monofibre (8) having a diameter larger than 500 .mu.m and a length longer than 3 m, the beam (23) is focussed to the object to be measured through the lens (32) of a microscope, the reflected beam passing through the microscope lens is separated from the incident beam in order to direct it towards the sensors of the matrix cameras (41, 42) of the charge coupling type and the spatial signals thus obtained are processed in order to reconstitute the contours of the object or to measure the covering between the two objects.

Abstract: The width of a line projecting out of or recessed on a medium such as an integrated circuit is measured. A device for that purpose includes a confocal optical assembly having a monomode light source delivering a beam having a flat wave front. An optical deflector scans the surface of the medium transversely to the line width of the beam. A separator separates the light beam directed towards the medium carrying the line from the beam reflected by the medium. A detector includes a blade placed at a position conjugate with the focal point of the optical assembly and orthogonal to the line whose width is to be measured and a differential sensor placed at a position conjugate with the pupil of the optical assembly and delivering a signal responsive to the difference of lighting on each side of the blade for comparison with a threshold.

Abstract: A laser apparatus comprising a resonant cavity, which comprises an assembly of two different reflectors and inside which is disposed an active medium capable of generating a radiation under the action of excitation means connected to said active medium. In addition, the apparatus comprises at least one supplementary resonant cavity of structure, similar to the preceding one, comprising an assembly of two different reflectors, and means for controlling the displacement of said resonant cavities making it possible to bring one or the other of said cavities coaxially into alingment with said active medium.

Abstract: This invention relates to a system for strictly positioning along an axis an object such as a wafer of semi-conducting material during a process of constructing integrated circuits, wherein it comprises:means for controlling the drive means for causing the carriage to make a displacement of acquisition of which the amplitude is at least equal to the step of the second optical grating;a generator generating, during said displacement of acquisition, a periodic reference signal, of period equal to the step of said second grating;multiplication means for forming the product of said period reference signal and of the signal actually delivered by said photoelectric sensor;means for summing the signal formed by the succession of said products;calculating means for determining the possible offset existing between said optical gratings; andmeans controlling the drive means to bring said optical gratings into strict alignment.

Abstract: A linear guiding system incorporating rolling members, having a central element and a peripheral element connected to each other by at least one pair of rolling member assemblies associated with blocks fixed on the peripheral element by means of screws, and disposed opposite one another on either side of the central element. There is a device for adjusting the pressure exerted by the rolling members on the central element when the fixing screws are loosened. The pressure adjusting device is outside of the guiding system and is adapted to be temporarily fast with the blocks, and comprises apparatus for measuring the pressure exerted by the rolling members on the central element.