Abstract: A polishing head includes a head housing having a first flange part that extends outward from an upper position of a circumferential surface of a cylindrical body and a second flange part that extends outward from a lower position of the circumferential surface, a membrane support ring that is sized to surround an outer circumference of the second flange part and has a third flange part that is formed at an upper end part thereof and located between the first flange part and the second flange part, a membrane that covers a lower end-side opening part of the membrane support ring and holds the wafer with a backing film pasted to a front surface thereof interposed therebetween, a retainer ring formed in a shape to surround an outer circumference of the substrate, and driving means that integrally horizontally rotates the head housing, the membrane support ring, and the retainer ring.

Abstract: A pressing mechanism of a polishing head includes a first pressing body configured so as to include a first airbag and a first pressure disc formed so that a portion near the center of a contact surface which comes into contact with an elastic body is convex-shaped towards the elastic body; and a second pressing body, which is formed as a cylinder having the first pressure disc disposed on the inner circumferential side thereof, and which is configured so as to include a second airbag and a second pressure disc formed so that a portion near the outer edge of a contact surface which comes into contact with the elastic body is concave-shaped towards the elastic body.

Abstract: A protruding portion (13), which has a central axis coincident with a rotational axis of a table (10), is formed at a center portion of a surface of the table (10). At the time of the surface processing, the table (10) is rotated under a state in which the processing target surface of the substrate (12) is supported horizontally at each of a plurality of parts on the table (10) spaced apart from a base end of the protruding portion (13) toward an outer peripheral end portion of the table (10) by a predetermined distance and at the same distance from a top end of the protruding portion (13). Then, a processing liquid is supplied toward the top end of the protruding portion (13). The processing liquid that has reached the processing target surface of each substrate (12) is then removed outside the table (10) by centrifugal force.

Abstract: By exhausting a gas in a second space (S2) surrounded by an outer wall of an inner barrel member (12) and an inner wall of an outer barrel member (13) outside an outer wall of the outer barrel member (13), a pressure in the second space (S2) is decreased so as to be lower than a pressure in a first space (S1) in the inner barrel member (12). This enables the gas in the first space (S1) to pass through a communication mechanism (30) and flow toward the second space (S2). At this time, an airflow passing through the communication mechanism (30) is “narrowed” so that the airflow is forced to flow. Thus, a mist containing particles or the like, which is generated when performing processing of the substrate (20), is efficiently exhausted from the first space (S1), therefore, contamination of the processing target surface of the substrate is prevented.

Abstract: A protruding portion (13), which has a central axis coincident with a rotational axis of a table (10), is formed at a center portion of a surface of the table (10). At the time of the surface processing, the table (10) is rotated under a state in which the processing target surface of the substrate (12) is supported horizontally at each of a plurality of parts on the table (10) spaced apart from a base end of the protruding portion (13) toward an outer peripheral end portion of the table (10) by a predetermined distance and at the same distance from a top end of the protruding portion (13). Then, a processing liquid is supplied toward the top end of the protruding portion (13). The processing liquid that has reached the processing target surface of each substrate (12) is then removed outside the table (10) by centrifugal force.

Abstract: A surgical knife having a body with a blade at one end is provided that has an attached, movable shield that can be moved between either one of two locked positions. The shield can be placed in one position in which it covers and protects the blade and in a second position where it forms a portion of the body for use of the knife.