Patents Assigned to Micro Motion Technology Co., Ltd.
  • Spatial phase shifting interferometer using multi wavelength
    Patent number: 9019368
    Abstract: Provided is a spatial phase shifting interferometer using a multi wavelength. More particularly, provided is a spatial phase shifting interferometer using a multi wavelength capable of more rapidly measuring a precise shape of a measurement object by simultaneously oscillating laser having different wavelengths and passing the oscillated laser through a beam splitter and a lens to analyze an interference fringe of the measurement object.
    Type: Grant
    Filed: November 2, 2012
    Date of Patent: April 28, 2015
    Assignees: Korea Research Institute of Standards and Science, Micro Motion Technology Co., Ltd.
    Inventors: Jae Wan Kim, Jong Ahn Kim, Dong-Won Lee