Patents Assigned to MICRO SYSTEM CO., LTD.
  • ROTATING AND HOLDING APPARATUS FOR SEMICONDUCTOR SUBSTRATE AND CONVEYING APPARATUS OF ROTATING AND HOLDING APPARATUS FOR SEMICONDUCTOR SUBSTRATE
    Publication number: 20130305992
    Abstract: A holding apparatus for a semiconductor substrate and a conveying apparatus for a semiconductor substrate. A susceptor is fixed to a rotational driving shaft to be attachable and detachable in a vertical direction, the opening portions are formed to extend through the susceptor in a thickness direction of the susceptor, and a meshing portion which meshes with the substrate holders releasably in a vertical direction so that the substrate holder can rotate according to rotation of the susceptor is provided below the susceptor.
    Type: Application
    Filed: February 4, 2011
    Publication date: November 21, 2013
    Applicants: MICRO SYSTEM CO., LTD., VARIOS CO., LTD.
    Inventor: Gyo Yamamoto