Patents Assigned to Micro Systems Engineering GmbH
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Patent number: 8923005Abstract: An electrical component and a method for the manufacture thereof, comprising a connection arrangement between an active surface of an electrical component and a carrier, wherein electrical connecting elements are disposed in a connection zone on the active surface and/or on the carrier, and at least one spacer element is provided, which is disposed on the active surface and/or on the carrier. The at least one spacer element has a smaller height than the connecting elements before the connecting elements are reflowed to produce the electrically conductive connection, and is preferably disposed in an edge region of the connection zone.Type: GrantFiled: February 20, 2012Date of Patent: December 30, 2014Assignee: Micro Systems Engineering GmbHInventors: Rainer Dohle, Florian Schuessler, Rolf Diehm, Oliver Kessling, Thomas Oppert
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Patent number: 8840797Abstract: A unique and cost-effective method for producing a multilayer ceramic structure by using a first green film that contains a ceramic material, and the multilayer ceramic structure produced thereby. The method including the steps of: (a) producing at least one porous region in the first green film, the at least one porous region extending from the surface of the first green film; (b) applying a first layer, in sections, to the surface of the first green film, wherein one section of the first layer is located above the at least one porous region produced in step (a); (c) positioning at least one additional green film on the surface of the first green film, to which the first layer has been applied; (d) laminating the first green film and the at least one additional green film to form a green film composite; and (e) sintering the green film composite.Type: GrantFiled: July 6, 2012Date of Patent: September 23, 2014Assignees: Micro Systems Engineering GmbH, Technische Universitaet WienInventors: Thomas Haas, Dieter Schwanke, Achim Bittner, Ulrich Schmid
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Patent number: 8586178Abstract: A method for producing a ceramic substrate material having a first layer and possibly a further layer is specified. The first layer comprises at least one first component made of a crystalline ceramic material and/or a glass material as a matrix and a second component made of a further crystalline ceramic material, which is provided in the matrix. An etching step is performed, mantle areas of the crystals and/or crystal agglomerates of the second component being etched selectively in the first layer to generate a cavity structure in the first layer. The present invention also relates to a corresponding ceramic substrate material, an antenna or an antenna array, and the use of the ceramic substrate material for an antenna or an antenna array.Type: GrantFiled: January 18, 2011Date of Patent: November 19, 2013Assignee: Micro Systems Engineering GmbHInventors: Dieter Schwanke, Achim Bittner, Ulrich Schmid, Mirco Harnack
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Patent number: 8529780Abstract: The invention relates to a ceramic substrate material having a first layer having a cavity structure formed therein, and at least one sealing layer situated on at least a part of the cavity structure. The first layer comprises at least one first component made of a crystalline ceramic material and/or a glass material as a matrix, the first layer containing a second component made of a further crystalline ceramic material, with selected mantle areas of the crystals and/or crystal agglomerates of the second component being etched out in such a way that the cavity structure is provided (preferably in the form of a pore and/or tube structure). The sealing layer seals the surface of the first layer in the areas on which it is situated (e.g., above the cavity structure), allowing application of thin-film structures to the cavity structure.Type: GrantFiled: September 18, 2009Date of Patent: September 10, 2013Assignee: Micro Systems Engineering GmbHInventors: Dieter Schwanke, Mirco Harnack, Achim Bittner, Ulrich Schmid
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Publication number: 20130022809Abstract: A unique and cost-effective method for producing a multilayer ceramic structure by using a first green film that contains a ceramic material, and the multilayer ceramic structure produced thereby. The method including the steps of: (a) producing at least one porous region in the first green film, the at least one porous region extending from the surface of the first green film; (b) applying a first layer, in sections, to the surface of the first green film, wherein one section of the first layer is located above the at least one porous region produced in step (a); (c) positioning at least one additional green film on the surface of the first green film, to which the first layer has been applied; (d) laminating the first green film and the at least one additional green film to form a green film composite; and (e) sintering the green film composite.Type: ApplicationFiled: July 6, 2012Publication date: January 24, 2013Applicants: TECHNISCHE UNIVERSITAET WIEN, MICRO SYSTEMS ENGINEERING GMBHInventors: Thomas Haas, Dieter Schwanke, Achim Bittner, Ulrich Schmid
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Publication number: 20120212918Abstract: An electrical component and a method for the manufacture thereof, comprising a connection arrangement between an active surface of an electrical component and a carrier, wherein electrical connecting elements are disposed in a connection zone on the active surface and/or on the carrier, and at least one spacer element is provided, which is disposed on the active surface and/or on the carrier. The at least one spacer element has a smaller height than the connecting elements before the connecting elements are reflowed to produce the electrically conductive connection, and is preferably disposed in an edge region of the connection zone.Type: ApplicationFiled: February 20, 2012Publication date: August 23, 2012Applicant: MICRO SYSTEMS ENGINEERING GMBHInventors: Rainer Dohle, Florian Schuessler, Rolf Diehm, Oliver Kessling, Thomas Oppert
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Patent number: 8128885Abstract: The invention relates to a microreactor having a substrate (10, 20, 80) with at least one catalytically active material arranged in and/or on a cavity structure (14, 24, 84). The substrate (10, 20, 80) has a first layer (11, 21, 80) and optionally at least one additional layer (12, 22) of a ceramic material, with the first layer (11, 21, 80) being formed from a first component of a crystalline ceramic material and/or a glass material as the matrix and a second component of an additional crystalline ceramic material. The surface areas of the crystals and/or crystal agglomerates of the second component in the first layer (11, 21, 80) are etched out in at least some areas to form the cavity structure (14, 24, 84).Type: GrantFiled: September 15, 2008Date of Patent: March 6, 2012Assignee: Micro Systems Engineering GmbHInventors: Dieter Schwanke, Mirco Harnack, Achim Bittner, Ulrich Schmid