Patents Assigned to Micro Systems Engineering GmbH
  • Patent number: 8923005
    Abstract: An electrical component and a method for the manufacture thereof, comprising a connection arrangement between an active surface of an electrical component and a carrier, wherein electrical connecting elements are disposed in a connection zone on the active surface and/or on the carrier, and at least one spacer element is provided, which is disposed on the active surface and/or on the carrier. The at least one spacer element has a smaller height than the connecting elements before the connecting elements are reflowed to produce the electrically conductive connection, and is preferably disposed in an edge region of the connection zone.
    Type: Grant
    Filed: February 20, 2012
    Date of Patent: December 30, 2014
    Assignee: Micro Systems Engineering GmbH
    Inventors: Rainer Dohle, Florian Schuessler, Rolf Diehm, Oliver Kessling, Thomas Oppert
  • Patent number: 8840797
    Abstract: A unique and cost-effective method for producing a multilayer ceramic structure by using a first green film that contains a ceramic material, and the multilayer ceramic structure produced thereby. The method including the steps of: (a) producing at least one porous region in the first green film, the at least one porous region extending from the surface of the first green film; (b) applying a first layer, in sections, to the surface of the first green film, wherein one section of the first layer is located above the at least one porous region produced in step (a); (c) positioning at least one additional green film on the surface of the first green film, to which the first layer has been applied; (d) laminating the first green film and the at least one additional green film to form a green film composite; and (e) sintering the green film composite.
    Type: Grant
    Filed: July 6, 2012
    Date of Patent: September 23, 2014
    Assignees: Micro Systems Engineering GmbH, Technische Universitaet Wien
    Inventors: Thomas Haas, Dieter Schwanke, Achim Bittner, Ulrich Schmid
  • Patent number: 8586178
    Abstract: A method for producing a ceramic substrate material having a first layer and possibly a further layer is specified. The first layer comprises at least one first component made of a crystalline ceramic material and/or a glass material as a matrix and a second component made of a further crystalline ceramic material, which is provided in the matrix. An etching step is performed, mantle areas of the crystals and/or crystal agglomerates of the second component being etched selectively in the first layer to generate a cavity structure in the first layer. The present invention also relates to a corresponding ceramic substrate material, an antenna or an antenna array, and the use of the ceramic substrate material for an antenna or an antenna array.
    Type: Grant
    Filed: January 18, 2011
    Date of Patent: November 19, 2013
    Assignee: Micro Systems Engineering GmbH
    Inventors: Dieter Schwanke, Achim Bittner, Ulrich Schmid, Mirco Harnack
  • Patent number: 8529780
    Abstract: The invention relates to a ceramic substrate material having a first layer having a cavity structure formed therein, and at least one sealing layer situated on at least a part of the cavity structure. The first layer comprises at least one first component made of a crystalline ceramic material and/or a glass material as a matrix, the first layer containing a second component made of a further crystalline ceramic material, with selected mantle areas of the crystals and/or crystal agglomerates of the second component being etched out in such a way that the cavity structure is provided (preferably in the form of a pore and/or tube structure). The sealing layer seals the surface of the first layer in the areas on which it is situated (e.g., above the cavity structure), allowing application of thin-film structures to the cavity structure.
    Type: Grant
    Filed: September 18, 2009
    Date of Patent: September 10, 2013
    Assignee: Micro Systems Engineering GmbH
    Inventors: Dieter Schwanke, Mirco Harnack, Achim Bittner, Ulrich Schmid
  • Publication number: 20130022809
    Abstract: A unique and cost-effective method for producing a multilayer ceramic structure by using a first green film that contains a ceramic material, and the multilayer ceramic structure produced thereby. The method including the steps of: (a) producing at least one porous region in the first green film, the at least one porous region extending from the surface of the first green film; (b) applying a first layer, in sections, to the surface of the first green film, wherein one section of the first layer is located above the at least one porous region produced in step (a); (c) positioning at least one additional green film on the surface of the first green film, to which the first layer has been applied; (d) laminating the first green film and the at least one additional green film to form a green film composite; and (e) sintering the green film composite.
    Type: Application
    Filed: July 6, 2012
    Publication date: January 24, 2013
    Applicants: TECHNISCHE UNIVERSITAET WIEN, MICRO SYSTEMS ENGINEERING GMBH
    Inventors: Thomas Haas, Dieter Schwanke, Achim Bittner, Ulrich Schmid
  • Publication number: 20120212918
    Abstract: An electrical component and a method for the manufacture thereof, comprising a connection arrangement between an active surface of an electrical component and a carrier, wherein electrical connecting elements are disposed in a connection zone on the active surface and/or on the carrier, and at least one spacer element is provided, which is disposed on the active surface and/or on the carrier. The at least one spacer element has a smaller height than the connecting elements before the connecting elements are reflowed to produce the electrically conductive connection, and is preferably disposed in an edge region of the connection zone.
    Type: Application
    Filed: February 20, 2012
    Publication date: August 23, 2012
    Applicant: MICRO SYSTEMS ENGINEERING GMBH
    Inventors: Rainer Dohle, Florian Schuessler, Rolf Diehm, Oliver Kessling, Thomas Oppert
  • Patent number: 8128885
    Abstract: The invention relates to a microreactor having a substrate (10, 20, 80) with at least one catalytically active material arranged in and/or on a cavity structure (14, 24, 84). The substrate (10, 20, 80) has a first layer (11, 21, 80) and optionally at least one additional layer (12, 22) of a ceramic material, with the first layer (11, 21, 80) being formed from a first component of a crystalline ceramic material and/or a glass material as the matrix and a second component of an additional crystalline ceramic material. The surface areas of the crystals and/or crystal agglomerates of the second component in the first layer (11, 21, 80) are etched out in at least some areas to form the cavity structure (14, 24, 84).
    Type: Grant
    Filed: September 15, 2008
    Date of Patent: March 6, 2012
    Assignee: Micro Systems Engineering GmbH
    Inventors: Dieter Schwanke, Mirco Harnack, Achim Bittner, Ulrich Schmid