Patents Assigned to MICROCHEM INC.
  • Tungsten precursor
    Patent number: 10618925
    Abstract: Provided are a tungsten precursor compound to which a substituent is bonded so as to obtain thermal stability and a method of forming a tungsten-containing film using the precursor.
    Type: Grant
    Filed: March 16, 2016
    Date of Patent: April 14, 2020
    Assignee: MICROCHEM INC.
    Inventors: Sam Keun Lee, Jong Taik Lee, Jun Young Lee, Ho Seob Kim
  • TUNGSTEN PRECURSOR, AND METHOD FOR DEPOSITING TUNGSTEN-CONTAINING FILM COMPRISING SAME
    Publication number: 20180208617
    Abstract: The present invention relates to a tungsten precursor compound to which a substituent is bonded so as to obtain thermal stability and a tungsten-containing film in a mild condition at a high yield, and a process for producing the same. The present invention also provides a method for depositing tungsten-containing film.
    Type: Application
    Filed: March 16, 2016
    Publication date: July 26, 2018
    Applicant: MICROCHEM INC.
    Inventors: Sam Keun LEE, Jong Taik LEE, Jun Young LEE, Ho Seob KIM