Abstract: A method for producing miniature, planar, hermetically sealed, electrical feedthrus having multiple layers of molybdenum conductors separated by aluminum which is anodized and selectively etched for providing supports for the multilayer. The exposed molybdenum is cleaned and oxidized and sealed with glass to provide a hermetic seal. Contact portions of the molybdenum are cleaned and plated whereby the contacts will accept a contact seal.
Type:
Grant
Filed:
April 9, 1987
Date of Patent:
May 31, 1988
Assignee:
Microelectronics and Computer Technologogy Corporation