Patents Assigned to Microelectronics Computer & Technology
  • Titanium-tungsten etching solutions
    Patent number: 5211807
    Abstract: Etchant solutions for titanium-tungsten, which include at least one oxidizing agent and at least one fluoride salt. Also disclosed is a method for etching TiW utilizing these etchants.
    Type: Grant
    Filed: July 2, 1991
    Date of Patent: May 18, 1993
    Assignee: Microelectronics Computer & Technology
    Inventor: Ian Y. K. Yee