Abstract: A ring seal for sealing opposing flow component sealing surfaces defines a fluid flow path that is suitable for applications such as a semiconductor manufacturing modular gas delivery system. The ring seal includes an annular extension in the form of a modified “delta” extending from one or both sealing surfaces of the ring seal. The modified “delta” extends to an apex or point above the ring seal's sealing surface. First and second extension surfaces extend in opposite directions from the apex back toward the ring seal's sealing surface. In one aspect, the first extension surface defines a ridge where the slope of the first extension surface changes to decline faster to the ring seal's sealing surface. In another aspect, the apex is located within the annular extension closer to the axial hole than to an outer radial diameter of the annular seal body.

Abstract: An example sealing system includes a retainer for a gasket wherein the retainer protects the polished sealing surface of the seal gasket from scratches before assembly by suspending the gasket inside the retainer, regardless of orientation. A gap in the circumference of the retainer allows the retainer to flex open for insertion of the seal gasket. A small chamfer on the inner diameter of the retainer aids the insertion of the seal into the retainer. The gap in the circumference of the retainer also allows the retainer to compress to a smaller circumference for a tight fit inside the sealing counterbore. A groove in the inner diameter of the retainer includes a protruding portion for the seal to engage. The depth of this groove is configured to provide some clearance inside the retainer for the protruding edge of the seal during a complete compression of the retainer.

Abstract: A retainer for a gasket used to connect modular piping in a modular gas delivery system to the gas flow controlling components protects the sealing surface of the gasket from scratches before assembly by suspending the gasket at least 0.003 inches inside the retainer, regardless of orientation. Additionally, a slit in the circumference of the retainer allows the retainer to flex open for insertion of the seal gasket, and to compress to a smaller circumference, for a tight fit inside the sealing counterbore. A chamfer on the ID of the retainer aids the easier insertion of the seal into the retainer. In the ID of the retainer, a groove engages a protruding portion of the seal. The depth of this groove is such that with a complete compression of the retainer where the circumferential gap is completely closed, the protruding edge of the seal still has some clearance. This clearance acts as a stop to prevent the retainer from being overly compressed.