Abstract: The present disclosure relates to an apparatus, system, and method for a microelectromechanical (MEM) device formed on a transparent, insulating substrate. The MEM device may take the form of an electrostatic comb actuator. The fabrication process employs three-dimensional structuring of the substrate to form the actuator combs, biasing elements, and linkages. The combs and other elements of the actuator may be rendered electrically conducting by a conformal conductive coating. The conductive coating may be segmented into a plurality of electrodes without the use of standard lithography techniques. A linear-rotational actuator is provided, which may comprise two perpendicularly-arranged, linear actuators that utilize moveable linkage beams in two orthogonal dimensions. A linear or torsional ratcheting actuator is also provided by using comb actuators in conjunction with a ratcheting wheel or cog. Furthermore, several methods for electrically connecting non-contiguous or enclosed elements are provided.

Abstract: The present disclosure relates to an apparatus, system and method for a microchannel valve. The valve is configured to control or switch the flow of gasses or liquids. The valve includes a first substrate with a microchannel interrupted by a rotational element having a matching microchannel. The rotational element is attached to a second substrate in contact with the first. Actuation of the valve is achieved by rotating the second substrate relative to the first. The valve may be configured for capillary input and output, and/or for high pressure operation by means of capillary retention features. The valve may be disposed within a subassembly for maintaining contact, axial alignment, and relative rotational alignment between the first and second substrates. The present disclosure also provides a method for fabricating the valve. The present disclosure also provides ways to eliminate gaps between the two substrates.