Patents Assigned to Microlas Lasersystm GmbH
  • Patent number: 5796521
    Abstract: An optical apparatus for the homogenization of laser radiation, in particular of an excimer laser, and for the generation of several lighting fields (F1, F2) from this radiation comprises a plurality of acentric lens segments (G1a, G1b, G1c, G1d; G2a, G2b, G2c, G2d). The acentric lens segments are characterized in that they are segments of cylindrical lenses with an axis of symmetry and that the portion of the cylindrical lens which contains the axis of symmetry is not part of the acentric lens segment. Several groups (G1, G2) of acentric cylindrical lens segments are provided, with each group generating a lighting field (F1, F2) of homogeneous energy density. A collecting lens (S) is arranged downstream of the acentric lens segments, which generates the lighting fields (F1, F2) on a work plane (E).
    Type: Grant
    Filed: July 17, 1997
    Date of Patent: August 18, 1998
    Assignee: Microlas Lasersystm GmbH
    Inventors: Hans-Jurgen Kahlert, Berthold Burghardt