Abstract: A micromachined blade suitable for medical applications has an edge which is free of the imperfections common in mechanically sharpened steel blades. A method of forming micromachined blades having the desired characteristics may be performed by etching with anisotropic or isotropic etchants. This micromachined blade may be formed of a single-crystalline substrate, such as a silicon wafer commonly used in integrated circuit technology. Thus, such a micromachined blade may also carry circuitry capable of assisting a surgeon in the performance of certain procedures.
Type:
Grant
Filed:
January 19, 1995
Date of Patent:
December 3, 1996
Assignee:
MicroMed, Incorporated
Inventors:
Mehran Mehregany, Randal H. Rudderman, Robert L. Mullen