Abstract: Microactuator comprising a volume changing layer (1) and a carrier substrate layer (2) carrying the volume changing layer (1), the microactuator also comprising a reinforcing structure (3) having an unevenly distributed bending stiffness and that the reinforcing structure (3) is spread over any of the layers (1), (2) to control the movement of the microactuator.
Type:
Grant
Filed:
November 6, 2002
Date of Patent:
August 23, 2005
Assignee:
Micromuscle AG
Inventors:
Magnus Krogh, Olle Inganäs, Edwin Jager