Patents Assigned to Micron Display Technology
  • Method for forming electron emitters
    Patent number: 5532177
    Abstract: Electron emitters and a method of fabricating emitters which have a concentration gradient of impurities, such that the highest concentration of impurities is at the apex of the emitters, and decreases toward the base of the emitters. The method comprises the steps of doping, patterning, etching, and oxidizing the substrate, thereby forming the emitters having impurity gradients.
    Type: Grant
    Filed: July 7, 1993
    Date of Patent: July 2, 1996
    Assignee: Micron Display Technology
    Inventor: David A. Cathey