Patents Assigned to Micron Technology, Inc.
  • Patent number: 6816402
    Abstract: A write conductor layout structure for minimizing programming currents of an MRAM is disclosed. A magnetic memory cell has sense layer which is positioned between a first conductor having a width in a first direction and a second conductor having a width in a second direction. The width of the first and/or second conductor is narrower than a corresponding width of the sense layer. At least one of the first and second conductors is positioned so that the edge of the conductor extends beyond the edge of the sense layer.
    Type: Grant
    Filed: June 21, 2002
    Date of Patent: November 9, 2004
    Assignee: Micron Technology, Inc.
    Inventor: James G. Deak
  • Patent number: 6815375
    Abstract: The invention encompasses a method of forming silicon nitride on a silicon-oxide-comprising material. The silicon-oxide-comprising material is exposed to activated nitrogen species from a nitrogen-containing plasma to introduce nitrogen into an upper portion of the material. The nitrogen is thermally annealed within the material to bond at least some of the nitrogen to silicon proximate the nitrogen. After the annealing, silicon nitride is chemical vapor deposited on the nitrogen-containing upper portion of the material. The invention also encompasses a method of forming a transistor device. A silicon-oxide-comprising layer is formed over a substrate. The silicon-oxide-comprising layer is exposed to nitrogen from a nitrogen-containing plasma to introduce nitrogen into an upper portion of the layer. The nitrogen is thermally annealed within the layer to bond at least some of the nitrogen silicon proximate the nitrogen.
    Type: Grant
    Filed: November 3, 2003
    Date of Patent: November 9, 2004
    Assignee: Micron Technology, Inc.
    Inventor: John T. Moore
  • Patent number: 6815818
    Abstract: An electrode structure includes a first layer of conductive material and a dielectric layer formed on a surface of the first layer. An opening is formed in the dielectric layer to expose a portion of the surface of the first layer. A binding layer is formed on the dielectric layer and on the exposed portion of the surface of the first layer and a second layer of conductive material is formed on the conductive binding layer. The binding layer can be an oxide and the second layer a conductive material that is diffusible into an oxide. The electrode structure can be annealed to cause conductive material from the second layer to be chemisorbed into the binding layer to improve adhesion between the first and second layers. A programmable cell can be formed by forming a doped glass layer in the electrode structure.
    Type: Grant
    Filed: November 19, 2001
    Date of Patent: November 9, 2004
    Assignee: Micron Technology, Inc.
    Inventors: John T. Moore, Joseph F. Brooks
  • Patent number: 6815308
    Abstract: An alignment mark mask element protects an underlying alignment mark during subsequent processing of the fabrication substrate. The alignment mark mask element is formed concurrent with formation of a photomask from a dual-tone photoresist that exhibits a pattern reversal upon exposure to an energy level. A portion of the dual-tone photoresist above the alignment mark is exposed to an energy sufficient to reverse a positive tone resist to a negative tone, which remains above the alignment mark after developing. The remainder of the dual-tone photoresist is exposed through a reticle at a lesser energy level and patterned to define aperture locations of a photomask for formation of semiconductor device features. In addition, a photomask for use on a fabrication substrate and an intermediate semiconductor device are disclosed. Methods of forming a photomask and an intermediate semiconductor device structure are also disclosed.
    Type: Grant
    Filed: August 15, 2002
    Date of Patent: November 9, 2004
    Assignee: Micron Technology, Inc.
    Inventors: Richard D. Holscher, Niroomand Ardavan
  • Patent number: 6815327
    Abstract: The present invention relates to an improved method for forming a UBM pad and solder bump connection for a flip-chip which eliminates at least two mask steps required in standard UBM pad forming processes when repatterning the bond pad locations.
    Type: Grant
    Filed: April 25, 2003
    Date of Patent: November 9, 2004
    Assignee: Micron Technology, Inc.
    Inventor: Warren M. Farnworth
  • Patent number: 6817002
    Abstract: A method and apparatus are provided for compensating propagation delay in an electronic system relating to corresponding signals becoming skewed by variations in the dielectric materials over which the respective, corresponding signals travel. Compensation for the propagation delay is done by selecting printed circuit boards which each have one side comprised of a dielectric substrate material exhibiting a first dielectric constant and another side comprised of a dielectric substrate material exhibiting a second dielectric constant. By transmitting each of the corresponding signals across a side of a printed circuit board with a first dielectric constant and a side with a second dielectric constant, the signals are each delayed substantially the same by the effects of the dielectric constant, reducing the skew to zero. In specific application, the printed circuit boards are most easily matched by selecting printed circuit boards from a common printed circuit board panel or array.
    Type: Grant
    Filed: August 20, 2002
    Date of Patent: November 9, 2004
    Assignee: Micron Technology, Inc.
    Inventor: Corey L. Larsen
  • Patent number: 6815805
    Abstract: The present invention provides a flash memory integrated circuit and a method of fabricating the same. A tunnel dielectric in an erasable programmable read only memory (EPROM) device is nitrided with a hydrogen-bearing compound, particularly ammonia. Hydrogen is thus incorporated into the tunnel dielectric, along with nitrogen. The gate stack is etched and completed, including protective sidewall spacers and dielectric cap, and the stack lined with a barrier to hydroxyl and hydrogen species. Though the liner advantageously reduces impurity diffusion through to the tunnel dielectric and substrate interface, it also reduces hydrogen diffusion in any subsequent hydrogen anneal. Hydrogen is provided to the tunnel dielectric, however, in the prior exposure to ammonia.
    Type: Grant
    Filed: January 15, 2004
    Date of Patent: November 9, 2004
    Assignee: Micron Technology, Inc.
    Inventor: Ronald A. Weimer
  • Patent number: 6815372
    Abstract: Insulating material is deposited onto a gate dielectric surface separating two wordline stacks, the method comprising the steps of: A. Forming at least two adjacent wordline stacks over a common gate dielectric, the stacks spaced apart from one another thereby forming an open surface on the gate dielectric between the stacks; and B. Depositing by sputtering the insulating material onto the open surface of the gate dielectric separating the two wordline stacks.
    Type: Grant
    Filed: August 14, 2003
    Date of Patent: November 9, 2004
    Assignee: Micron Technology, Inc.
    Inventor: Kevin L. Beaman
  • Patent number: 6815261
    Abstract: A molding machine for encapsulating electronic devices mounted on one side of a substrate, and having a ball-grid array, pin-grid array, or land-grid array on the opposite side, has a two member biased floating plate apparatus to compensate for variations in substrate thickness, and a gas collection/venting apparatus for relieving gases emitted from the non-encapsulated underside of the substrate.
    Type: Grant
    Filed: August 23, 2002
    Date of Patent: November 9, 2004
    Assignee: Micron Technology, Inc.
    Inventor: Leonard E. Mess
  • Patent number: 6816424
    Abstract: A static memory device that utilizes differential current bit line drivers to write information into the device's memory cells, and differential current sensing read amplifiers to read information from the cells. The drivers and amplifiers operate using limited differential current. The use of limited differential current, as opposed to voltages, reduces the power consumed by the device and increases the speed of read and write operations.
    Type: Grant
    Filed: November 17, 2003
    Date of Patent: November 9, 2004
    Assignee: Micron Technology, Inc.
    Inventor: Zvi Regev
  • Patent number: 6815344
    Abstract: A method of forming a crystalline phase material includes, a) providing a stress inducing material within or operatively adjacent a crystalline material of a first crystalline phase; and b) annealing the crystalline material of the first crystalline phase under conditions effective to transform it to a second crystalline phase. The stress inducing material preferably induces compressive stress within the first crystalline phase during the anneal to the second crystalline phase to lower the required activation energy to produce a more dense second crystalline phase. Example compressive stress inducing layers include SiO2 and Si3N4, while example stress inducing materials for providing into layers are Ge, W and Co. Where the compressive stress inducing material is provided on the same side of a wafer over which the crystalline phase material is provided, it is provided to have a thermal coefficient of expansion which is less than the first phase crystalline material.
    Type: Grant
    Filed: January 31, 2002
    Date of Patent: November 9, 2004
    Assignee: Micron Technology, Inc.
    Inventors: Gurtej S. Sandhu, Sujit Sharan
  • Patent number: 6815743
    Abstract: One or more deep-array implants under the photosensitive region of a semiconductor substrate are conducted to improve optical cross-talk between pixel cells. According to an embodiment of the present invention, one or more deep-array implants of a first conductivity type are used to dope predefined regions of a well of a second conductivity type. This way, first conductivity type dopants from the one or more deep-array implants counterdope second conductivity type dopants from the predefined regions of the well. The dosage and energy of each deep-array implant may be optimized so that the collection of signal carriers by the photosensitive region and the photoresponse for different wavelengths are maximized.
    Type: Grant
    Filed: January 30, 2003
    Date of Patent: November 9, 2004
    Assignee: Micron Technology, Inc.
    Inventor: Howard E. Rhodes
  • Publication number: 20040217484
    Abstract: Embodiments concern contacts for use in integrated circuits, which have a reduced likelihood of shorting to unrelated portions of an overlying conductive layer due to contact misalignment. Embodiments for forming the integrated circuit include performing a first etching process to pattern the conductive layer, where the etching compound used in the first etching process is relatively selective to the conductive layer's materials. Embodiments also include performing a second, contact related etching process that removes a portion of any misaligned contacts that were exposed by the first etching process, where the etching compound used in the second etching process is selective to the contacts' materials. The embodiments can be used to form vias and other interconnect structures as well. The modified contacts and vias are adapted for use in conjunction with memory cells and apparatus incorporating such memory cells, as well as other integrated circuits.
    Type: Application
    Filed: May 27, 2004
    Publication date: November 4, 2004
    Applicant: Micron Technology, Inc.
    Inventor: Philip J. Ireland
  • Publication number: 20040219713
    Abstract: A flexible film interposer for stacking a flip chip semiconductor die onto a second (bottom) semiconductor die, semiconductor devices and stacked die assemblies that incorporate the flexible film interposer, and methods of fabricating the devices and assemblies are provided. The incorporation of the flexible film interposer achieves densely packaged semiconductor devices, without the need for a redistribution layer (RDL).
    Type: Application
    Filed: May 25, 2004
    Publication date: November 4, 2004
    Applicant: Micron Technology, Inc.
    Inventor: Teck Kheng Lee
  • Publication number: 20040217463
    Abstract: This invention relates to circuit boards and methods of fabricating circuit boards. A circuit board includes a core layer and a surface layer. The core layer includes a number of fibers and the surface layer has a thickness that is between about 10% and about 30% of the circuit board thickness. Including fibers in the core layer increases the strength of the circuit board. The surface layer is essentially free of fibers and relatively thick. The thickness of the surface layer inhibits the formation of cracks in the circuit board, which improves the reliability of circuits and systems coupled to the circuit board.
    Type: Application
    Filed: May 28, 2004
    Publication date: November 4, 2004
    Applicant: Micron Technology, Inc.
    Inventors: Tongbi Jiang, Yong Du
  • Publication number: 20040217481
    Abstract: Disclosed structures and methods inhibit atomic migration and related capacitive-resistive effects between a metallization layer and an insulator layer in a semiconductor structure. One exemplary structure includes an inhibiting layer between an insulator and a metallization layer. The insulator includes a polymer or an insulating oxide compound. And, the inhibiting layer has a compound formed from a reaction between the polymer or insulating oxide compound and a transition metal, a representative metal, or a metalloid.
    Type: Application
    Filed: May 26, 2004
    Publication date: November 4, 2004
    Applicant: Micron Technology, Inc.
    Inventor: Paul A. Farrar
  • Publication number: 20040217352
    Abstract: One aspect of the present invention relates to a method for forming a strained semiconductor structure. In various embodiments, at least two strong bonding regions are defined for a desired bond between a crystalline semiconductor membrane and a crystalline semiconductor substrate. The two strong bonding regions are separated by a weak bonding region. The membrane is bonded to the substrate at a predetermined misorientation. The membrane is pinned to the substrate in the strong bonding regions. The predetermined misorientation provides the membrane in the weak bonding region with a desired strain. In various embodiments, the membrane is bonded to the substrate at a predetermined twist angle to biaxially strain the membrane in the weak bonding region. In various embodiments, the membrane is bonded to the substrate at a predetermined tilt angle to uniaxially strain the membrane in the weak bonding region. Other aspects are provided herein.
    Type: Application
    Filed: April 29, 2003
    Publication date: November 4, 2004
    Applicant: Micron Technology, Inc.
    Inventor: Leonard Forbes
  • Publication number: 20040218444
    Abstract: A semiconductor memory with wordline timing, which links activating a wordline to an isolation signal. The isolation signal is applied to a memory section adjacent the memory section containing the wordline to be activated. Upon such an isolation signal shifting low and isolating the adjacent memory section, a timing circuit triggers a wordline decoder to activate a select wordline. The timing circuit prevents activation of the wordline decoder until the isolation signal is received.
    Type: Application
    Filed: May 26, 2004
    Publication date: November 4, 2004
    Applicant: Micron Technology, Inc.
    Inventor: Ramandeep S. Sawhney
  • Publication number: 20040220693
    Abstract: Systems and methods of modeling a best-guess semiconductor process flow for fabricating a desired semiconductor device are provided. The best-guess process flow is modeled using an inverse modeling technique. This technique reverse engineers a desired semiconductor device to synthesize a model of a fabrication process that is likely to produce the desired semiconductor device. First, a desired device having one or more desired characteristics is modeled. Then, various process and material parameters, constraints, and actual measured data are used to synthesize one or more unique software models that represent a process flow likely to fabricate the desired device. If more than one process flow is modeled, various parameters are modified iteratively until a unique process flow model is synthesized.
    Type: Application
    Filed: June 8, 2004
    Publication date: November 4, 2004
    Applicant: Micron Technology, Inc.
    Inventor: Chandra V. Mouli
  • Publication number: 20040218442
    Abstract: A word line driver includes multiple current paths for driving a word line of a memory device to a negative voltage and a positive voltage. When driving the word line from the negative voltage to the positive voltage, the word line driver uses a first current path to drive the word line to the positive voltage in one stage. When driving the word line from the positive voltage to the negative voltage, the word line driver drives the word line from the positive voltage to ground using the first current path in a first stage. In a second stage, the word driver further drives the word line from ground to the negative voltage in using a second current path.
    Type: Application
    Filed: May 25, 2004
    Publication date: November 4, 2004
    Applicant: Micron Technology, Inc.
    Inventors: Howard Kirsch, Tae Hyoung Kim, Charles L. Ingalls