Patents Assigned to MicroOptical Corporation
  • Patent number: 6201629
    Abstract: A torsional micro-mechanical mirror system includes a mirror assembly rotatably supported by a torsional mirror support assembly for rotational movement over and within a cavity in a base. The cavity is sized sufficiently to allow unimpeded rotation of the mirror assembly. The mirror assembly includes a support structure for supporting a reflective layer. The support structure is coplanar with and formed from the same wafer as the base. The torsional mirror support assembly includes at least one torsion spring formed of an electroplated metal. An actuator assembly is operative to apply a driving force to torsionally drive the torsional mirror support assembly, whereby torsional motion of the torsional mirror support assembly causes rotational motion of the mirror assembly. In another embodiment, a magnetic actuator assembly is provided to drive the mirror assembly.
    Type: Grant
    Filed: August 26, 1998
    Date of Patent: March 13, 2001
    Assignees: MicroOptical Corporation, Northeastern University
    Inventors: Robert William McClelland, Noa More Rensing, Mark Bradley Spitzer, Paul Daniel Aquilino, Paul Martin Zavracky