Patents Assigned to MicroPhysics Inc
  • Patent number: 7715017
    Abstract: An apparatus and a method for measuring very small separations between a transparent or semi-transparent first body and a second body, wherein one or more light sources produce light that is split into two distinct paths. One path is directed through the first body at two locations, one where it reflects from the interface at the separation to be measured, and another where the second body does not affect the reflection. The second path is directed at a frequency shifter, which shifts the frequency of the light. The two paths are recombined and interfereometric variations of intensity, substantially at the frequency of the shifter, are detected. The difference in phase between the measurement and reference areas with the second body not present is subtracted from the difference in phase between the measurement and reference areas with the second body present. The difference in differences yields the phase change that occurs when the second body is introduced.
    Type: Grant
    Filed: December 13, 2004
    Date of Patent: May 11, 2010
    Assignee: MicroPhysics Inc
    Inventor: Christopher Allen Lacey