Abstract: High emissivity molybdenum silicide-containing ceramic and metal-ceramic products are provided, especially for use as heaters in rapid solidification processing (RSP) and rapid thermal processing (RTP). Novel designs incorporating such heaters are also provided.
Type:
Grant
Filed:
January 28, 1999
Date of Patent:
August 8, 2000
Assignee:
Micropyrctics Heaters International, Inc.