Abstract: A method of controlling a Micro-Electro-Mechanical System (MEMS) valve includes defining a desired pressure output for the MEMS valve. The desired pressure output is related to a control reference value. The control reference value relates an output pressure of the MEMS valve to a measurable characteristic of the MEMS valve. The measurable characteristic may include a resistance, an electrical power, or an electrical current of the MEMS valve. The control reference value is converted to an initial Pulse Width Modulated (PWM) signal that is applied to the MEMS valve. The initial PWM signal may be adjusted to define an adjusted PWM signal based upon a difference between an actual value of the measurable characteristic at the initial PWM signal and the control reference value, until the actual value of the measurable characteristic at the adjusted PWM signal is within a pre-defined range of the control reference value.

Abstract: A device is disclosed for controlling a variable displacement compressor. The device comprises a microvalve operated control valve. A microvalve device for controlling fluid flow and a micro spool valve for use as a microvalve are also disclosed.