Abstract: A MEMS switch includes a latch mechanism, first and second electrical conductors, a first latch actuator, a second latch actuator, and an axial actuator. The latch mechanism may include a transfer rod and a contact member, the contact member extending radially outwardly from a position along the axial length of the transfer rod. The first and second electrical conductors may extend along, and may be radially offset from, a portion of the transfer rod. The first latch actuator may include a first latch pin, and the second latch actuator may include a second latch pin, the first and second latch actuators being configured to move toward and away from the transfer rod, and the first and second latch pins configured to engage the contact member. The at least one axial actuator may be configured to move the contact member towards and away from the first and second electrical conductors.

Abstract: A MEMS switch includes a latch mechanism, first and second electrical conductors, a first latch actuator, a second latch actuator, and an axial actuator. The latch mechanism may include a transfer rod and a contact member, the contact member extending radially outwardly from a position along the axial length of the transfer rod. The first and second electrical conductors may extend along, and may be radially offset from, a portion of the transfer rod. The first latch actuator may include a first latch pin, and the second latch actuator may include a second latch pin, the first and second latch actuators being configured to move toward and away from the transfer rod, and the first and second latch pins configured to engage the contact member. The at least one axial actuator may be configured to move the contact member towards and away from the first and second electrical conductors.

Abstract: A microelectromechanical (MEMS) switch includes a substrate, a force-activated latching mechanism, and a spring-loaded shuttle. The latching mechanism has a proximal end and a distal end. In an embodiment, the latching mechanism includes two flexible latch arms each fixed at or about a proximal end and having a free distal end, and a connector connecting the latch arms. The spring-loaded shuttle includes a shuttle portion including a portion configured for engaging portions of the latch arms. The shuttle portion further being configured to translate about the substrate. The latching mechanism and the shuttle may be configured to include an electrical contact layer such that when the latch arms are engaged with the shuttle portion, a closed electrical circuit can be formed.

Abstract: A microelectromechanical device wherein the displacement of an electrothermally compliant actuator is perpendicular to a mounting substrate allowing in a first embodiment a fluid control valve to be opened and closed and in a second embodiment a plurality of electrical contacts to be opened and closed. The electrothermally compliant actuator is comprised of a pair of beam structures having a joined thick beam and then beam such that a flow of electrical current causes the beam structures to bend. A flexible isolation layer is used to thermally isolate the electrothermally compliant actuator from the fluid in another valve assembly embodiment.