Patents Assigned to MicroSurfaces, Inc.
  • Methods for forming composite coatings on MEMS devices
    Patent number: 7201937
    Abstract: The present invention provides unique methods of coating and novel coatings for MEMS devices. In general a two step process includes the coating of a first silane onto a substrate surface followed by a second treatment with or without a second silane and elevated temperatures.
    Type: Grant
    Filed: August 15, 2003
    Date of Patent: April 10, 2007
    Assignee: MicroSurfaces, Inc.
    Inventor: Xiaoyang Zhu