Abstract: A self optimizing device for controlling a heating unit in a manner so as to improve the energy efficiency of the heating unit using an autocalibration processor. The heating unit employs a heating medium that is heated by the heating unit and which transfers the heat into an ambient atmosphere outside of the heating unit. The heating unit has an on-state initiated when a characteristic of the heating medium representative of the heating capacity of the medium decreases below a minimum level, and an off-state initiated when the characteristic of the heating medium reaches a maximum level. The controller includes an input element, an output element, a time-measuring element, and a processor. The input element receives a signal from a sensor, the signal indicating the heating medium characteristic representative of the heating capacity of the heating medium. The output element signals the heating unit to begin its on-state.

Abstract: An optical inspection module detects defects on an active surface of a substrate in an integrated process tool system. The optical inspection module includes an enclosure, a substrate holder, a light source, a light beam path, a lens and a photodetector array. The light source has a light beam port. The light beam path extends from the light beam port to the substrate holder and has a grazing angle of incidence with respect to the active surface of the substrate. The light beam path illuminates substantially the entire active surface. The lens is oriented to collect non-secularly reflected light scattered from the light beam path by any defects on the active surface. The photodetector array has a plurality of pixels which are positioned within a focal plane of the lens. Each pixel corresponds to an area on the active surface, and the plurality of pixels together form a field of view that covers substantially the entire active surface.